In-process fast surface measurement using wavelength scanning interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A wavelength scanning interferometry system for fast areal surface measurement of micro and nano-scale surfaces which is immune to environmental noise is introduced in this paper. It can be used for surface measurement of discontinuous surface profiles by producing phase shifts without any mechanical scanning process. White light spectral scanning interferometry, together with an acousto-optic tuneable filtering technique, is used to measure both smooth surfaces and those with large step heights. An active servo control system is used to serve as a phase compensating mechanism to eliminate the effects of environmental noise. The system can be used for on-line or in-process measurement on a shop floor.

Original languageEnglish
Title of host publicationManufacturing Science and Technology III
Pages357-360
Number of pages4
Volume622
DOIs
Publication statusPublished - 2013
Event3rd International Conference on Manufacturing Science and Technology - New Delhi, India
Duration: 18 Aug 201219 Aug 2012
Conference number: 3

Publication series

NameAdvanced Materials Research
Volume622
ISSN (Print)10226680

Conference

Conference3rd International Conference on Manufacturing Science and Technology
Abbreviated titleICMST 2012
CountryIndia
CityNew Delhi
Period18/08/1219/08/12

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Gao, F., Muhamedsalih, H., & Jiang, X. (2013). In-process fast surface measurement using wavelength scanning interferometry. In Manufacturing Science and Technology III (Vol. 622, pp. 357-360). (Advanced Materials Research; Vol. 622). https://doi.org/10.4028/www.scientific.net/AMR.622-623.357