In-situ high dynamic range inspection in Ebeam machine based on fringe projection profilometry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Future Advanced Metrology Hub
Jiang, J. (PI), Martin, H. (CoI), Longstaff, A. (CoI), Kadirkamanathan, V. (CoI), Turner, M. S. (CoI), Keogh, P. (CoI), Scott, P. (CoI), McLeay, T. E. (CoI), Blunt, L. (CoI), Zeng, W. (CoI), Huntley, J. M. (CoI), Bills, P. (CoI), Fletcher, S. (CoI), Gao, F. (CoI), Coupland, J. M. (CoI), Kinnell, P. (CoI), Mahfouf, M. (CoI) & Mullineux, G. (CoI)
1/10/16 → 30/09/23
Project: Research

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