In Situ Real-Time Measurement for Micro-Structured Surfaces

X. Jiang

doi:10.1016/j.cirp.2011.03.074

In Situ Real-Time Measurement for Micro-Structured Surfaces

X. Jiang

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

A fundamentally improved technology for micro structured surface measurement, based on Wavelength Division Multiplexing (WDM) and Graphics Processing Unit (GPU) techniques is introduced. The WDM technique allows phase-to-depth implementation over large measurement ratios (range/resolution) while the GPU technique allows the analysis of the optical interferograms in real-time. This research attempts to create a new kind of full-field measurement to replace electro-mechanical scanning with white-light interferometry and to form a compact system that is fast, robust and suitable for in situ surface measurement. An experimental system has been developed for the manufacture of diamond turned/fly cut micro-structured surfaces on a large drum diamond turning machine (DTM).

Original language	English
Pages (from-to)	563-566
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	60
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2011.03.074
Publication status	Published - 18 Apr 2011

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In Situ Real-Time Measurement for Micro-Structured Surfaces

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