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Influence of deposition pressure and pulsed dc sputtering on pumping properties of Ti-Zr-V nonevaporable getter films
O. B. Malyshev, R. Valizadeh, J. S. Colligon, A. Hannah, K. J. Middleman, S. Patel, V. M. Vishnyakov
Research output: Contribution to journal › Article › peer-review
42
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(Scopus)