Influence of mechanical properties on the nanoscratch behaviour of hard nanocomposite TiN/Si3N4 coatings on Si

B. D. Beake, V. M. Vishnyakov, R. Valizadeh, J. S. Colligon

Research output: Contribution to journalArticlepeer-review

78 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Influence of mechanical properties on the nanoscratch behaviour of hard nanocomposite TiN/Si3N4 coatings on Si'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemistry