Influence of preamorphization on the structural properties of ultrashallow arsenic implants in silicon

L. Capello, T. H. Metzger, M. Werner, J. A. Van Den Berg, M. Servidori, L. Ottaviano, C. Bongiorno, G. Mannino, T. Feudel, M. Herden, V. Holý

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Influence of preamorphization on the structural properties of ultrashallow arsenic implants in silicon'. Together they form a unique fingerprint.

Physics & Astronomy