Integration of On-machine Surface Measurement into Fast Tool Servo Machining

Wenbin Zhong; Zhen Tong; Jane Jiang

Integration of On-machine Surface Measurement into Fast Tool Servo Machining

Research output: Contribution to journal › Conference article › peer-review

Abstract

Fast tool servo (FTS) machining is a highly efficient approach to generate optical freeform surfaces and microstructures, where submicrometric form accuracy and nanometric surface finish are often required. The on-machine surface measurement (OMSM) is an enabling technology to improve the metrology efficiency and machining accuracy of FTS. However, the integration of the OMSM with FTS on an ultra-precision machine is a huge challenge due to the complexity of data processing and synchronization. In this paper, a dedicated controller is in-house developed with data processing algorithms for the integration. The effectiveness of the proposed method is demonstrated through the successful fabrication and measurement of a freeform lens array

Original language	English
Journal	Procedia CIRP
Publication status	Accepted/In press - 8 Feb 2021
Event	9th CIRP Conference on High Performance Cutting - Virtual Online Duration: 24 May 2021 → 26 May 2021 Conference number: 9 https://www.amrc.co.uk/pages/hpc2020

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CIRP-HPC20202-revised_final_pure
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Licence: CC BY-NC-ND

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@article{2d0967910f0b4350a4b9cb91c5a5bbe1,

title = "Integration of On-machine Surface Measurement into Fast Tool Servo Machining",

abstract = "Fast tool servo (FTS) machining is a highly efficient approach to generate optical freeform surfaces and microstructures, where submicrometric form accuracy and nanometric surface finish are often required. The on-machine surface measurement (OMSM) is an enabling technology to improve the metrology efficiency and machining accuracy of FTS. However, the integration of the OMSM with FTS on an ultra-precision machine is a huge challenge due to the complexity of data processing and synchronization. In this paper, a dedicated controller is in-house developed with data processing algorithms for the integration. The effectiveness of the proposed method is demonstrated through the successful fabrication and measurement of a freeform lens array",

keywords = "Fast tool servo, On-machine surface measurement, Integration, Freeform",

author = "Wenbin Zhong and Zhen Tong and Jane Jiang",

year = "2021",

month = feb,

day = "8",

language = "English",

journal = "Procedia CIRP",

issn = "2212-8271",

publisher = "Elsevier",

note = "9th CIRP Conference on High Performance Cutting ; Conference date: 24-05-2021 Through 26-05-2021",

url = "https://www.amrc.co.uk/pages/hpc2020",

}

TY - JOUR

T1 - Integration of On-machine Surface Measurement into Fast Tool Servo Machining

AU - Zhong, Wenbin

AU - Tong, Zhen

AU - Jiang, Jane

N1 - Conference code: 9

PY - 2021/2/8

Y1 - 2021/2/8

N2 - Fast tool servo (FTS) machining is a highly efficient approach to generate optical freeform surfaces and microstructures, where submicrometric form accuracy and nanometric surface finish are often required. The on-machine surface measurement (OMSM) is an enabling technology to improve the metrology efficiency and machining accuracy of FTS. However, the integration of the OMSM with FTS on an ultra-precision machine is a huge challenge due to the complexity of data processing and synchronization. In this paper, a dedicated controller is in-house developed with data processing algorithms for the integration. The effectiveness of the proposed method is demonstrated through the successful fabrication and measurement of a freeform lens array

AB - Fast tool servo (FTS) machining is a highly efficient approach to generate optical freeform surfaces and microstructures, where submicrometric form accuracy and nanometric surface finish are often required. The on-machine surface measurement (OMSM) is an enabling technology to improve the metrology efficiency and machining accuracy of FTS. However, the integration of the OMSM with FTS on an ultra-precision machine is a huge challenge due to the complexity of data processing and synchronization. In this paper, a dedicated controller is in-house developed with data processing algorithms for the integration. The effectiveness of the proposed method is demonstrated through the successful fabrication and measurement of a freeform lens array

KW - Fast tool servo

KW - On-machine surface measurement

KW - Integration

KW - Freeform

M3 - Conference article

JO - Procedia CIRP

JF - Procedia CIRP

SN - 2212-8271

T2 - 9th CIRP Conference on High Performance Cutting

Y2 - 24 May 2021 through 26 May 2021

ER -

Integration of On-machine Surface Measurement into Fast Tool Servo Machining

Abstract

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