Interferometry for Online/In-Process Surface Inspection

Research output: Chapter in Book/Report/Conference proceedingChapter

5 Citations (Scopus)

Abstract

Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.
LanguageEnglish
Title of host publicationOptical Interferometry
EditorsAlexander A. Banishev, Mithun Bhowmick, Jue Wang
PublisherInTech
Pages41-59
Number of pages18
ISBN (Electronic)978-953-51-2956-1
ISBN (Print)978-953-51-2955-4
DOIs
Publication statusPublished - 15 Feb 2017

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Cite this

Gao, F. (2017). Interferometry for Online/In-Process Surface Inspection. In A. A. Banishev, M. Bhowmick, & J. Wang (Eds.), Optical Interferometry (pp. 41-59). [Chapter 3] InTech. https://doi.org/10.5772/66530
Gao, Feng. / Interferometry for Online/In-Process Surface Inspection. Optical Interferometry. editor / Alexander A. Banishev ; Mithun Bhowmick ; Jue Wang. InTech, 2017. pp. 41-59
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Gao, F 2017, Interferometry for Online/In-Process Surface Inspection. in AA Banishev, M Bhowmick & J Wang (eds), Optical Interferometry., Chapter 3, InTech, pp. 41-59. https://doi.org/10.5772/66530

Interferometry for Online/In-Process Surface Inspection. / Gao, Feng.

Optical Interferometry. ed. / Alexander A. Banishev; Mithun Bhowmick; Jue Wang. InTech, 2017. p. 41-59 Chapter 3.

Research output: Chapter in Book/Report/Conference proceedingChapter

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N2 - Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.

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KW - online/in-process measurement

KW - surface measurement

KW - environmental disturbance

KW - reference interferometer

KW - common path

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Gao F. Interferometry for Online/In-Process Surface Inspection. In Banishev AA, Bhowmick M, Wang J, editors, Optical Interferometry. InTech. 2017. p. 41-59. Chapter 3 https://doi.org/10.5772/66530