Interferometry for Online/In-Process Surface Inspection

Feng Gao

doi:10.5772/66530

Interferometry for Online/In-Process Surface Inspection

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.

Original language	English
Title of host publication	Optical Interferometry
Editors	Alexander A. Banishev, Mithun Bhowmick, Jue Wang
Publisher	InTech
Pages	41-59
Number of pages	18
ISBN (Electronic)	978-953-51-2956-1
ISBN (Print)	978-953-51-2955-4
DOIs	https://doi.org/10.5772/66530
Publication status	Published - 15 Feb 2017

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SDG 9 Industry, Innovation, and Infrastructure

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abstract = "Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.",

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N2 - Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.

AB - Interferometers are normally operated in environment-controlled optical laboratories because vibrations will induce errors in measurement results. In order to extend the application of interferometry to shop floor inspection, two methods are adapted: one method is to introduce a reference interferometer and vibration compensation system to the main interferometer, to compensate for the environmental disturbance; and the other method is to realize the data sample in just one image shot. Each method has its own applications. With the advances of these technologies, the use of interferometry as a highly accurate and fast measurement method will become more common in shop floor measurements and inspections.

KW - online/in-process measurement

KW - surface measurement

KW - environmental disturbance

KW - reference interferometer

KW - common path

KW - vibration compensation

U2 - 10.5772/66530

DO - 10.5772/66530

M3 - Chapter

SN - 978-953-51-2955-4

SP - 41

EP - 59

BT - Optical Interferometry

A2 - Banishev, Alexander A.

A2 - Bhowmick, Mithun

A2 - Wang, Jue

PB - InTech

ER -

Interferometry for Online/In-Process Surface Inspection

Abstract

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