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Interferometry for Online/In-Process Surface Inspection
Feng Gao
Department of Engineering
School of Computing and Engineering
Centre for Precision Technologies
Research output
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Chapter in Book/Report/Conference proceeding
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Chapter
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peer-review
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Keyphrases
In-process
100%
Surface Inspection
100%
Interferometry
100%
Interferometer
66%
Measurement Method
33%
Measurement Accuracy
33%
Highly Accurate
33%
Measurement Results
33%
Vibration Compensation
33%
Compensation System
33%
Fast Measurement
33%
Errors in Measurement
33%
Reference Interferometer
33%
Environmental Disturbance
33%
Engineering
Surface Process
100%
Interferometry
100%
Inspection Surface
100%
Shop Floor
66%
Data Sample
33%
Environmental Disturbance
33%
Physics
Interferometry
100%
Measurement Method
33%