Investigation of focused ion beam induced damage in single crystal diamond tools

Zhen Tong, Xichun Luo

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In this work, transmission electron microscope (TEM) measurements and molecular dynamics (MD) simulations were carried out to characterise the focused ion beam (FIB) induced damage layer in a single crystal diamond tool under different FIB processing voltages. The results obtained from the experiments and the simulations are in good agreement. The results indicate that during FIB processing cutting tools made of natural single crystal diamond, the energetic Ga+ collision will create an impulse-dependent damage layer at the irradiated surface. For the tested beam voltages in a typical FIB system (from 8kV to 30kV), the thicknesses of the damaged layers formed on a diamond tool surface increased from 11.5nm to 27.6nm. The dynamic damage process of FIB irradiation and ion-solid interactions physics leading to processing defects in FIB milling were emulated by MD simulations. The research findings from this study provide the in-depth understanding of the wear of nanoscale multi-tip diamond tools considering the FIB irradiation induced doping and defects during the tool fabrication process.

LanguageEnglish
Pages727-735
Number of pages9
JournalApplied Surface Science
Volume347
Early online date24 Apr 2015
DOIs
Publication statusPublished - 30 Aug 2015
Externally publishedYes

Fingerprint

Diamond
Focused ion beams
Diamonds
Single crystals
Molecular dynamics
Processing
Irradiation
Defects
Computer simulation
Electric potential
Cutting tools
Electron microscopes
Physics
Doping (additives)
Wear of materials
Ions
Fabrication

Cite this

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title = "Investigation of focused ion beam induced damage in single crystal diamond tools",
abstract = "In this work, transmission electron microscope (TEM) measurements and molecular dynamics (MD) simulations were carried out to characterise the focused ion beam (FIB) induced damage layer in a single crystal diamond tool under different FIB processing voltages. The results obtained from the experiments and the simulations are in good agreement. The results indicate that during FIB processing cutting tools made of natural single crystal diamond, the energetic Ga+ collision will create an impulse-dependent damage layer at the irradiated surface. For the tested beam voltages in a typical FIB system (from 8kV to 30kV), the thicknesses of the damaged layers formed on a diamond tool surface increased from 11.5nm to 27.6nm. The dynamic damage process of FIB irradiation and ion-solid interactions physics leading to processing defects in FIB milling were emulated by MD simulations. The research findings from this study provide the in-depth understanding of the wear of nanoscale multi-tip diamond tools considering the FIB irradiation induced doping and defects during the tool fabrication process.",
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Investigation of focused ion beam induced damage in single crystal diamond tools. / Tong, Zhen; Luo, Xichun.

In: Applied Surface Science, Vol. 347, 30.08.2015, p. 727-735.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Investigation of focused ion beam induced damage in single crystal diamond tools

AU - Tong, Zhen

AU - Luo, Xichun

PY - 2015/8/30

Y1 - 2015/8/30

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KW - Diamond tool

KW - Focused ion beam

KW - Irradiation damage

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