TY - JOUR
T1 - Investigation of ion induced bending mechanism for nanostructures
AU - Rajput, Nitul S.
AU - Tong, Zhen
AU - Luo, Xichun
PY - 2015/1
Y1 - 2015/1
N2 - Ion induced bending is a promising controlled technique for manipulating nanoscale structures. However, the underlying mechanism of the process is not well understood. In this letter, we report a detailed study of the bending mechanism of Si nanowires (NWs) under Ga+ irradiation. The microstructural changes in theNWdue to ion beam irradiation are studied and molecular dynamics simulations are used to explore the ion-NWinteraction processes. The simulation results are compared with the microstructural studies of theNW. The investigations inform a generic understanding of the bending process in crystalline materials, which we suggest to be feasible as a versatile manipulation and integration technique in nanotechnology.
AB - Ion induced bending is a promising controlled technique for manipulating nanoscale structures. However, the underlying mechanism of the process is not well understood. In this letter, we report a detailed study of the bending mechanism of Si nanowires (NWs) under Ga+ irradiation. The microstructural changes in theNWdue to ion beam irradiation are studied and molecular dynamics simulations are used to explore the ion-NWinteraction processes. The simulation results are compared with the microstructural studies of theNW. The investigations inform a generic understanding of the bending process in crystalline materials, which we suggest to be feasible as a versatile manipulation and integration technique in nanotechnology.
KW - Focused ion beam (FIB)
KW - Ion matter interaction
KW - Nanostructure manipulation
KW - Si nanowire
UR - http://www.scopus.com/inward/record.url?scp=84938139853&partnerID=8YFLogxK
UR - http://iopscience.iop.org/journal/2053-1591
U2 - 10.1088/2053-1591/2/1/015002
DO - 10.1088/2053-1591/2/1/015002
M3 - Article
AN - SCOPUS:84938139853
VL - 2
JO - Materials Research Express
JF - Materials Research Express
SN - 2053-1591
IS - 1
M1 - 015002
ER -