Investigation of kinematics error influence on on-machine measurement for ultra-precision turning

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Shift from offline measurement to on-machine measurement (OMM) is urgently needed for closed-loop control for ultra-precision machining processes. OMM can avoid the errors caused by repositioning workpieces and increases the inspection efficiency. In this work, an in-house designed interferometer probe was integrated on a 3-axis ultra-precision diamond turning machine for OMM.
However, as the probe is carried on the motion slides, kinematics errors of the machine tool will inevitably affect the OMM results. To investigate the influence of kinematics errors, simulation analysis was performed and the four primary error components in the sensitive measurement direction were measured by capacitance sensors using the reversal method. Finally, an OMM experiment of an optical flat surface was carried out. The results prove that OMM error was dominated by the C axis tilt error EBC with a 2 UPR (undulations per revolution) component along circumferential direction.
Original languageEnglish
Title of host publicationProceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Subtitle of host publicationJune 4th-8th 2018, Venice, IT
EditorsOltmann Riemer, Enrico Savio, D. Billington, R. K. Leach, Dishi Phillips
Publishereuspen
Pages143-144
Number of pages2
ISBN (Print)9780995775121
Publication statusPublished - 5 Jun 2018
EventEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition - Venice, Italy
Duration: 4 Jun 20188 Jun 2018
Conference number: 18
https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information)

Conference

ConferenceEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition
Abbreviated titleEUSPEN
CountryItaly
CityVenice
Period4/06/188/06/18
Internet address

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  • Cite this

    Li, D., Tong, Z., Blunt, L., Ding, F., & Jiang, X. (2018). Investigation of kinematics error influence on on-machine measurement for ultra-precision turning. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN): June 4th-8th 2018, Venice, IT (pp. 143-144). euspen. https://www.euspen.eu/knowledge-base/ICE18126.pdf