Abstract
Shift from offline measurement to on-machine measurement (OMM) is urgently needed for closed-loop control for ultra-precision machining processes. OMM can avoid the errors caused by repositioning workpieces and increases the inspection efficiency. In this work, an in-house designed interferometer probe was integrated on a 3-axis ultra-precision diamond turning machine for OMM.
However, as the probe is carried on the motion slides, kinematics errors of the machine tool will inevitably affect the OMM results. To investigate the influence of kinematics errors, simulation analysis was performed and the four primary error components in the sensitive measurement direction were measured by capacitance sensors using the reversal method. Finally, an OMM experiment of an optical flat surface was carried out. The results prove that OMM error was dominated by the C axis tilt error EBC with a 2 UPR (undulations per revolution) component along circumferential direction.
However, as the probe is carried on the motion slides, kinematics errors of the machine tool will inevitably affect the OMM results. To investigate the influence of kinematics errors, simulation analysis was performed and the four primary error components in the sensitive measurement direction were measured by capacitance sensors using the reversal method. Finally, an OMM experiment of an optical flat surface was carried out. The results prove that OMM error was dominated by the C axis tilt error EBC with a 2 UPR (undulations per revolution) component along circumferential direction.
| Original language | English |
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| Title of host publication | Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN) |
| Subtitle of host publication | June 4th-8th 2018, Venice, IT |
| Editors | Oltmann Riemer, Enrico Savio, D. Billington, R. K. Leach, Dishi Phillips |
| Publisher | euspen |
| Pages | 143-144 |
| Number of pages | 2 |
| ISBN (Print) | 9780995775121 |
| Publication status | Published - 5 Jun 2018 |
| Event | European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition - Venice, Italy Duration: 4 Jun 2018 → 8 Jun 2018 Conference number: 18 https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information) |
Conference
| Conference | European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition |
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| Abbreviated title | EUSPEN 2018 |
| Country/Territory | Italy |
| City | Venice |
| Period | 4/06/18 → 8/06/18 |
| Internet address |
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