Abstract
Current international standardisation effort in the field of areal surface texture measurement includes the development of a series of documents describing the nominal characteristics of, and calibration methods for, areal surface topography measuring instruments. Technical committee ISO/TC 213/WG 16, which is directly involved in developing such documents, identified, based on the fact that all areal surface topography measuring instruments produce 3D data sets of points [1], a set of metrological characteristics applicable to all these instruments regardless of their design or operation. Metrological characteristics are input quantities, in a measurement model, that can be measured directly [2], generally using calibrated material measures, and make an immediate contribution to the measurement uncertainty associated with the measured coordinates provided by the instrument. The set of metrological characteristics includes: measurement noise; residual flatness; amplification and linearity of the scales; squareness of the axes; and resolution. In two previous papers, methods to determine measurement noise and residual flatness [3] and amplification, linearity and squareness of the axes [4] were presented. A full paper on the determination of resolution is under review at the time of writing [5] and this work is also summarised here.
Original language | English |
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Title of host publication | Fringe 2013 |
Subtitle of host publication | 7th International Workshop on Advanced Optical Imaging and Metrology |
Editors | Wolfgang Osten |
Publisher | Springer Berlin |
Pages | 405-410 |
Number of pages | 6 |
ISBN (Print) | 9783642363580 |
DOIs | |
Publication status | Published - 1 Jan 2014 |
Externally published | Yes |
Event | 7th International Workshop on Advanced Optical Imaging and Metrology - Institute for Technical Optice, Nurtingen, Germany Duration: 8 Sep 2013 → 11 Sep 2013 Conference number: 7 |
Workshop
Workshop | 7th International Workshop on Advanced Optical Imaging and Metrology |
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Abbreviated title | Fringe 2013 |
Country/Territory | Germany |
City | Nurtingen |
Period | 8/09/13 → 11/09/13 |