ISO definition of resolution for surface topography measuring instruments

Richard Leach, Claudiu Giusca, Andrew Henning, Ben Sherlock, Jeremy Coupland

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Current international standardisation effort in the field of areal surface texture measurement includes the development of a series of documents describing the nominal characteristics of, and calibration methods for, areal surface topography measuring instruments. Technical committee ISO/TC 213/WG 16, which is directly involved in developing such documents, identified, based on the fact that all areal surface topography measuring instruments produce 3D data sets of points [1], a set of metrological characteristics applicable to all these instruments regardless of their design or operation. Metrological characteristics are input quantities, in a measurement model, that can be measured directly [2], generally using calibrated material measures, and make an immediate contribution to the measurement uncertainty associated with the measured coordinates provided by the instrument. The set of metrological characteristics includes: measurement noise; residual flatness; amplification and linearity of the scales; squareness of the axes; and resolution. In two previous papers, methods to determine measurement noise and residual flatness [3] and amplification, linearity and squareness of the axes [4] were presented. A full paper on the determination of resolution is under review at the time of writing [5] and this work is also summarised here.
Original languageEnglish
Title of host publicationFringe 2013
Subtitle of host publication7th International Workshop on Advanced Optical Imaging and Metrology
EditorsWolfgang Osten
PublisherSpringer Berlin
Pages405-410
Number of pages6
ISBN (Print)9783642363580
DOIs
Publication statusPublished - 1 Jan 2014
Externally publishedYes
Event7th International Workshop on Advanced Optical Imaging and Metrology - Institute for Technical Optice, Nurtingen, Germany
Duration: 8 Sep 201311 Sep 2013
Conference number: 7

Workshop

Workshop7th International Workshop on Advanced Optical Imaging and Metrology
Abbreviated titleFringe 2013
CountryGermany
CityNurtingen
Period8/09/1311/09/13

Fingerprint

Surface topography
Amplification
Standardization
Textures
Calibration

Cite this

Leach, R., Giusca, C., Henning, A., Sherlock, B., & Coupland, J. (2014). ISO definition of resolution for surface topography measuring instruments. In W. Osten (Ed.), Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology (pp. 405-410). Springer Berlin. https://doi.org/10.1007/978-3-642-36359-7_73
Leach, Richard ; Giusca, Claudiu ; Henning, Andrew ; Sherlock, Ben ; Coupland, Jeremy. / ISO definition of resolution for surface topography measuring instruments. Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. editor / Wolfgang Osten. Springer Berlin, 2014. pp. 405-410
@inproceedings{98dd8c57e6ef4bf98355f6fbc1f9a723,
title = "ISO definition of resolution for surface topography measuring instruments",
abstract = "Current international standardisation effort in the field of areal surface texture measurement includes the development of a series of documents describing the nominal characteristics of, and calibration methods for, areal surface topography measuring instruments. Technical committee ISO/TC 213/WG 16, which is directly involved in developing such documents, identified, based on the fact that all areal surface topography measuring instruments produce 3D data sets of points [1], a set of metrological characteristics applicable to all these instruments regardless of their design or operation. Metrological characteristics are input quantities, in a measurement model, that can be measured directly [2], generally using calibrated material measures, and make an immediate contribution to the measurement uncertainty associated with the measured coordinates provided by the instrument. The set of metrological characteristics includes: measurement noise; residual flatness; amplification and linearity of the scales; squareness of the axes; and resolution. In two previous papers, methods to determine measurement noise and residual flatness [3] and amplification, linearity and squareness of the axes [4] were presented. A full paper on the determination of resolution is under review at the time of writing [5] and this work is also summarised here.",
keywords = "Spatial Frequency, Metrological Characteristic, Nominal Characteristic, Sinusoidal Profile, Geometrical Product Specification",
author = "Richard Leach and Claudiu Giusca and Andrew Henning and Ben Sherlock and Jeremy Coupland",
year = "2014",
month = "1",
day = "1",
doi = "10.1007/978-3-642-36359-7_73",
language = "English",
isbn = "9783642363580",
pages = "405--410",
editor = "Wolfgang Osten",
booktitle = "Fringe 2013",
publisher = "Springer Berlin",
address = "Germany",

}

Leach, R, Giusca, C, Henning, A, Sherlock, B & Coupland, J 2014, ISO definition of resolution for surface topography measuring instruments. in W Osten (ed.), Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. Springer Berlin, pp. 405-410, 7th International Workshop on Advanced Optical Imaging and Metrology, Nurtingen, Germany, 8/09/13. https://doi.org/10.1007/978-3-642-36359-7_73

ISO definition of resolution for surface topography measuring instruments. / Leach, Richard; Giusca, Claudiu; Henning, Andrew; Sherlock, Ben; Coupland, Jeremy.

Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. ed. / Wolfgang Osten. Springer Berlin, 2014. p. 405-410.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - ISO definition of resolution for surface topography measuring instruments

AU - Leach, Richard

AU - Giusca, Claudiu

AU - Henning, Andrew

AU - Sherlock, Ben

AU - Coupland, Jeremy

PY - 2014/1/1

Y1 - 2014/1/1

N2 - Current international standardisation effort in the field of areal surface texture measurement includes the development of a series of documents describing the nominal characteristics of, and calibration methods for, areal surface topography measuring instruments. Technical committee ISO/TC 213/WG 16, which is directly involved in developing such documents, identified, based on the fact that all areal surface topography measuring instruments produce 3D data sets of points [1], a set of metrological characteristics applicable to all these instruments regardless of their design or operation. Metrological characteristics are input quantities, in a measurement model, that can be measured directly [2], generally using calibrated material measures, and make an immediate contribution to the measurement uncertainty associated with the measured coordinates provided by the instrument. The set of metrological characteristics includes: measurement noise; residual flatness; amplification and linearity of the scales; squareness of the axes; and resolution. In two previous papers, methods to determine measurement noise and residual flatness [3] and amplification, linearity and squareness of the axes [4] were presented. A full paper on the determination of resolution is under review at the time of writing [5] and this work is also summarised here.

AB - Current international standardisation effort in the field of areal surface texture measurement includes the development of a series of documents describing the nominal characteristics of, and calibration methods for, areal surface topography measuring instruments. Technical committee ISO/TC 213/WG 16, which is directly involved in developing such documents, identified, based on the fact that all areal surface topography measuring instruments produce 3D data sets of points [1], a set of metrological characteristics applicable to all these instruments regardless of their design or operation. Metrological characteristics are input quantities, in a measurement model, that can be measured directly [2], generally using calibrated material measures, and make an immediate contribution to the measurement uncertainty associated with the measured coordinates provided by the instrument. The set of metrological characteristics includes: measurement noise; residual flatness; amplification and linearity of the scales; squareness of the axes; and resolution. In two previous papers, methods to determine measurement noise and residual flatness [3] and amplification, linearity and squareness of the axes [4] were presented. A full paper on the determination of resolution is under review at the time of writing [5] and this work is also summarised here.

KW - Spatial Frequency

KW - Metrological Characteristic

KW - Nominal Characteristic

KW - Sinusoidal Profile

KW - Geometrical Product Specification

UR - http://www.scopus.com/inward/record.url?scp=84904015462&partnerID=8YFLogxK

U2 - 10.1007/978-3-642-36359-7_73

DO - 10.1007/978-3-642-36359-7_73

M3 - Conference contribution

SN - 9783642363580

SP - 405

EP - 410

BT - Fringe 2013

A2 - Osten, Wolfgang

PB - Springer Berlin

ER -

Leach R, Giusca C, Henning A, Sherlock B, Coupland J. ISO definition of resolution for surface topography measuring instruments. In Osten W, editor, Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. Springer Berlin. 2014. p. 405-410 https://doi.org/10.1007/978-3-642-36359-7_73