ISO definition of resolution for surface topography measuring instruments

Richard Leach, Claudiu Giusca, Andrew Henning, Ben Sherlock, Jeremy Coupland

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

Current international standardisation effort in the field of areal surface texture measurement includes the development of a series of documents describing the nominal characteristics of, and calibration methods for, areal surface topography measuring instruments. Technical committee ISO/TC 213/WG 16, which is directly involved in developing such documents, identified, based on the fact that all areal surface topography measuring instruments produce 3D data sets of points [1], a set of metrological characteristics applicable to all these instruments regardless of their design or operation. Metrological characteristics are input quantities, in a measurement model, that can be measured directly [2], generally using calibrated material measures, and make an immediate contribution to the measurement uncertainty associated with the measured coordinates provided by the instrument. The set of metrological characteristics includes: measurement noise; residual flatness; amplification and linearity of the scales; squareness of the axes; and resolution. In two previous papers, methods to determine measurement noise and residual flatness [3] and amplification, linearity and squareness of the axes [4] were presented. A full paper on the determination of resolution is under review at the time of writing [5] and this work is also summarised here.
LanguageEnglish
Title of host publicationFringe 2013
Subtitle of host publication7th International Workshop on Advanced Optical Imaging and Metrology
EditorsWolfgang Osten
PublisherSpringer Berlin
Pages405-410
Number of pages6
ISBN (Print)9783642363580
DOIs
Publication statusPublished - 1 Jan 2014
Externally publishedYes
Event7th International Workshop on Advanced Optical Imaging and Metrology - Institute for Technical Optice, Nurtingen, Germany
Duration: 8 Sep 201311 Sep 2013
Conference number: 7

Workshop

Workshop7th International Workshop on Advanced Optical Imaging and Metrology
Abbreviated titleFringe 2013
CountryGermany
CityNurtingen
Period8/09/1311/09/13

Fingerprint

Surface topography
Amplification
Standardization
Textures
Calibration

Cite this

Leach, R., Giusca, C., Henning, A., Sherlock, B., & Coupland, J. (2014). ISO definition of resolution for surface topography measuring instruments. In W. Osten (Ed.), Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology (pp. 405-410). Springer Berlin. https://doi.org/10.1007/978-3-642-36359-7_73
Leach, Richard ; Giusca, Claudiu ; Henning, Andrew ; Sherlock, Ben ; Coupland, Jeremy. / ISO definition of resolution for surface topography measuring instruments. Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. editor / Wolfgang Osten. Springer Berlin, 2014. pp. 405-410
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Leach, R, Giusca, C, Henning, A, Sherlock, B & Coupland, J 2014, ISO definition of resolution for surface topography measuring instruments. in W Osten (ed.), Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. Springer Berlin, pp. 405-410, 7th International Workshop on Advanced Optical Imaging and Metrology, Nurtingen, Germany, 8/09/13. https://doi.org/10.1007/978-3-642-36359-7_73

ISO definition of resolution for surface topography measuring instruments. / Leach, Richard; Giusca, Claudiu; Henning, Andrew; Sherlock, Ben; Coupland, Jeremy.

Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. ed. / Wolfgang Osten. Springer Berlin, 2014. p. 405-410.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Leach R, Giusca C, Henning A, Sherlock B, Coupland J. ISO definition of resolution for surface topography measuring instruments. In Osten W, editor, Fringe 2013 : 7th International Workshop on Advanced Optical Imaging and Metrology. Springer Berlin. 2014. p. 405-410 https://doi.org/10.1007/978-3-642-36359-7_73