Abstract
In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 |
| Publisher | euspen |
| Pages | 302-305 |
| Number of pages | 4 |
| Volume | 1 |
| ISBN (Electronic) | 0955308224, 9780955308222 |
| Publication status | Published - 24 May 2007 |
| Event | 7th International Conference European Society for Precision Engineering and Nanotechnology - Bremen, Germany Duration: 20 May 2007 → 24 May 2007 Conference number: 7 |
Conference
| Conference | 7th International Conference European Society for Precision Engineering and Nanotechnology |
|---|---|
| Abbreviated title | EUSPEN 2007 |
| Country | Germany |
| City | Bremen |
| Period | 20/05/07 → 24/05/07 |
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Light-beam scanning interferometry for on-line ultra precision surface measurement. / Wang, Kaiwei; Jiang, Xiangqian; Martin, Haydn; Blunt, Liam.
Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Vol. 1 euspen, 2007. p. 302-305.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Light-beam scanning interferometry for on-line ultra precision surface measurement
AU - Wang, Kaiwei
AU - Jiang, Xiangqian
AU - Martin, Haydn
AU - Blunt, Liam
PY - 2007/5/24
Y1 - 2007/5/24
N2 - In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.
AB - In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.
UR - http://www.scopus.com/inward/record.url?scp=84908260904&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84908260904
VL - 1
SP - 302
EP - 305
BT - Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
PB - euspen
ER -