Light-beam scanning interferometry for on-line ultra precision surface measurement

Kaiwei Wang; Xiangqian Jiang; Haydn Martin; Liam Blunt

Light-beam scanning interferometry for on-line ultra precision surface measurement

Kaiwei Wang, Xiangqian Jiang, Haydn Martin, Liam Blunt

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.

Original language	English
Title of host publication	Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Publisher	euspen
Pages	302-305
Number of pages	4
Volume	1
ISBN (Electronic)	0955308224, 9780955308222
Publication status	Published - 24 May 2007
Event	7th International Conference European Society for Precision Engineering and Nanotechnology - Bremen, Germany Duration: 20 May 2007 → 24 May 2007 Conference number: 7

Conference

Conference	7th International Conference European Society for Precision Engineering and Nanotechnology
Abbreviated title	EUSPEN 2007
Country	Germany
City	Bremen
Period	20/05/07 → 24/05/07

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title = "Light-beam scanning interferometry for on-line ultra precision surface measurement",

abstract = "In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.",

author = "Kaiwei Wang and Xiangqian Jiang and Haydn Martin and Liam Blunt",

year = "2007",

month = may,

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booktitle = "Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007",

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note = "7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 ; Conference date: 20-05-2007 Through 24-05-2007",

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Wang, K, Jiang, X , Martin, H & Blunt, L 2007, Light-beam scanning interferometry for on-line ultra precision surface measurement. in Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. vol. 1, euspen, pp. 302-305, 7th International Conference European Society for Precision Engineering and Nanotechnology, Bremen, Germany, 20/05/07.

Light-beam scanning interferometry for on-line ultra precision surface measurement. / Wang, Kaiwei; Jiang, Xiangqian ; Martin, Haydn ; Blunt, Liam.

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007. Vol. 1 euspen, 2007. p. 302-305.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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