Light-beam scanning interferometry for on-line ultra precision surface measurement

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.

Original languageEnglish
Title of host publicationProceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007
Publishereuspen
Pages302-305
Number of pages4
Volume1
ISBN (Electronic)0955308224, 9780955308222
Publication statusPublished - 24 May 2007
Event7th International Conference European Society for Precision Engineering and Nanotechnology - Bremen, Germany
Duration: 20 May 200724 May 2007
Conference number: 7

Conference

Conference7th International Conference European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2007
CountryGermany
CityBremen
Period20/05/0724/05/07

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  • Cite this

    Wang, K., Jiang, X., Martin, H., & Blunt, L. (2007). Light-beam scanning interferometry for on-line ultra precision surface measurement. In Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 (Vol. 1, pp. 302-305). euspen.