Abstract
In this paper we propose a new measurement technique for on-line measurement of ultra precision surfaces based on light-beam scanning interferometry. The system is immune to environmental noise due to using active stabilisation to effectively eliminate noises. It also features a large lateral measurement scale and a fast measurement speed due to using light-beam scanning method.
| Original language | English |
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| Title of host publication | Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007 |
| Publisher | euspen |
| Pages | 302-305 |
| Number of pages | 4 |
| Volume | 1 |
| ISBN (Electronic) | 0955308224, 9780955308222 |
| Publication status | Published - 24 May 2007 |
| Event | 7th International Conference of the European Society for Precision Engineering and Nanotechnology - Bremen, Germany Duration: 20 May 2007 → 24 May 2007 Conference number: 7 |
Conference
| Conference | 7th International Conference of the European Society for Precision Engineering and Nanotechnology |
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| Abbreviated title | EUSPEN 2007 |
| Country/Territory | Germany |
| City | Bremen |
| Period | 20/05/07 → 24/05/07 |