Limitations and innovations in scanning white light interferometry

J. Lobera; F. Gao; J. Petzing; J. Coupland; R. Leach

Limitations and innovations in scanning white light interferometry

J. Lobera, F. Gao, J. Petzing, J. Coupland, R. Leach

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.

Original language	English
Title of host publication	Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
Editors	Hendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
Publisher	euspen
Pages	287-291
Number of pages	5
Volume	2
ISBN (Electronic)	9780955308253
Publication status	Published - May 2008
Externally published	Yes
Event	10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology - Zurich, Switzerland Duration: 18 May 2008 → 22 May 2008 Conference number: 10

Conference

Conference	10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated title	EUSPEN 2008
Country/Territory	Switzerland
City	Zurich
Period	18/05/08 → 22/05/08

Cite this

Lobera, J., Gao, F., Petzing, J., Coupland, J., & Leach, R. (2008). Limitations and innovations in scanning white light interferometry. In H. Van Brussel, E. Brinksmeier, H. Spaan, & T. Burke (Eds.), Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 (Vol. 2, pp. 287-291). euspen.

@inproceedings{4dd72c0eaf4046c69eb27c6666e5d0de,

title = "Limitations and innovations in scanning white light interferometry",

abstract = "Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.",

author = "J. Lobera and F. Gao and J. Petzing and J. Coupland and R. Leach",

year = "2008",

month = may,

language = "English",

volume = "2",

pages = "287--291",

editor = "{Van Brussel}, Hendrik and E. Brinksmeier and H. Spaan and T. Burke",

booktitle = "Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008",

publisher = "euspen",

address = "United Kingdom",

note = "10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 ; Conference date: 18-05-2008 Through 22-05-2008",

}

Lobera, J, Gao, F, Petzing, J, Coupland, J & Leach, R 2008, Limitations and innovations in scanning white light interferometry. in H Van Brussel, E Brinksmeier, H Spaan & T Burke (eds), Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008. vol. 2, euspen, pp. 287-291, 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, Zurich, Switzerland, 18/05/08.

Limitations and innovations in scanning white light interferometry. / Lobera, J.; Gao, F.; Petzing, J. et al.

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008. ed. / Hendrik Van Brussel; E. Brinksmeier; H. Spaan; T. Burke. Vol. 2 euspen, 2008. p. 287-291.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Limitations and innovations in scanning white light interferometry

AU - Lobera, J.

AU - Gao, F.

AU - Petzing, J.

AU - Coupland, J.

AU - Leach, R.

N1 - Conference code: 10

PY - 2008/5

Y1 - 2008/5

N2 - Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.

AB - Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.

UR - http://www.scopus.com/inward/record.url?scp=84862653063&partnerID=8YFLogxK

UR - https://www.tib.eu/de/suchen/id/TIBKAT%3A569111293/Proceedings-of-the-10th-anniversary-international/

M3 - Conference contribution

AN - SCOPUS:84862653063

VL - 2

SP - 287

EP - 291

BT - Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008

A2 - Van Brussel, Hendrik

A2 - Brinksmeier, E.

A2 - Spaan, H.

A2 - Burke, T.

PB - euspen

T2 - 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology

Y2 - 18 May 2008 through 22 May 2008

ER -

Limitations and innovations in scanning white light interferometry

Abstract

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