Limitations and innovations in scanning white light interferometry

J. Lobera, F. Gao, J. Petzing, J. Coupland, R. Leach

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.

Original languageEnglish
Title of host publicationProceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008
EditorsHendrik Van Brussel, E. Brinksmeier, H. Spaan, T. Burke
Publishereuspen
Pages287-291
Number of pages5
Volume2
ISBN (Electronic)9780955308253
Publication statusPublished - May 2008
Externally publishedYes
Event10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology - Zurich, Switzerland
Duration: 18 May 200822 May 2008
Conference number: 10

Conference

Conference10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2008
CountrySwitzerland
CityZurich
Period18/05/0822/05/08

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