Local Arsenic Structure in Shallow Implants in Si following SPER: An EXAFS and MEIS study

G. Pepponi, D. Giubertoni, S. Gennaro, M. Bersani, M. Anderle, R. Grisenti, M. Werner, J. A. Van Den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Citations (Scopus)

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Physics & Astronomy