Machine Acceleration Effects on Computer Controlled Polishing

Oliver Faehnle, Christina Reynolds, Guoyu Yu, David Walker

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Citation (Scopus)

Abstract

This paper analyzes the impact of tool mass acceleration (TMA) values onto footprint shape stability in computer controlled polishing, presenting the second derivative footprint recording (SECondo) method. The first experimental evidence is presented, demonstrating that for bonnet polishing, acceleration of tool mass significantly alters the pressure distribution within the footprint and consequently affects its cross section. In addition, we present experimental data indicating that it is possible to compensate for TMA effects by adjusting the inclination angle of precession during CCP accordingly.
Original languageEnglish
Title of host publicationOptical Fabrication and Testing Conference Proceedings 2017
PublisherOSA - The Optical Society
Number of pages3
ISBN (Electronic)9781943580316
Publication statusPublished - 1 Aug 2017
EventOptical Fabrication and Testing 2017 - Denver, United States
Duration: 9 Jul 201713 Jul 2017
https://www.osapublishing.org/conference.cfm?meetingid=30&yr=2017#OM4B (Link to Conference Details )

Conference

ConferenceOptical Fabrication and Testing 2017
Country/TerritoryUnited States
CityDenver
Period9/07/1713/07/17
Internet address

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