Magnetron sputtering technique for analyzing the influence of RF sputtering power on microstructural surface morphology of aluminum thin films deposited on SiO2/Si substrates

Somayeh Asgary, Elnaz Vaghri, Masoumeh Daemi, Parisa Esmaili, Amir H. Ramezani, Saim Memon, Siamak Hoseinzadeh

Research output: Contribution to journal › Article › peer-review

36   Link opens in a new tab Citations (Scopus)

Fingerprint

Dive into the research topics of 'Magnetron sputtering technique for analyzing the influence of RF sputtering power on microstructural surface morphology of aluminum thin films deposited on SiO2/Si substrates'. Together they form a unique fingerprint.
Sort by

Keyphrases

Engineering

Material Science