Magnetron sputtering technique for analyzing the influence of RF sputtering power on microstructural surface morphology of aluminum thin films deposited on SiO2/Si substrates

Somayeh Asgary, Elnaz Vaghri, Masoumeh Daemi, Parisa Esmaili, Amir H. Ramezani, Saim Memon, Siamak Hoseinzadeh

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21 Citations (Scopus)

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