Measurement of influence function using swing arm profilometer and laser tracker

Hongwei Jing; Christopher King; David Walker

doi:10.1364/OE.18.005271

Measurement of influence function using swing arm profilometer and laser tracker

Hongwei Jing, Christopher King, David Walker

Research output: Contribution to journal › Article › peer-review

34 Citations (Scopus)

Abstract

We present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2μm in PV, 7.271mm³ in volume. The 3D profilometer result is 48.4μm in PV, 7.289mm³ in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument.

Original language	English
Pages (from-to)	5271-5281
Number of pages	11
Journal	Optics Express
Volume	18
Issue number	5
DOIs	https://doi.org/10.1364/OE.18.005271
Publication status	Published - 1 Mar 2010
Externally published	Yes

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abstract = "We present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2μm in PV, 7.271mm3 in volume. The 3D profilometer result is 48.4μm in PV, 7.289mm3 in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument.",

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AB - We present a novel method to accurately measure 3D polishing influence functions by using a swing arm profilometer (SAP) and a laser tracker. The laser tracker is used to align the SAP and measure the parameters of the SAP setup before measuring the influence function. The instruments and the measurement method are described, together with measurement uncertainty analysis. An influence function deliberately produced with asymmetric form in order to create a challenging test is measured, and compared with that of a commercial 3D profilometer. The SAP result is 48.2μm in PV, 7.271mm3 in volume. The 3D profilometer result is 48.4μm in PV, 7.289mm3 in volume. The forms of the two results show excellent correlation. This gives confidence of the viability of the SAP method for larger influence functions out of range of the commercial instrument.

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Measurement of influence function using swing arm profilometer and laser tracker

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