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Medium Energy Ion Scattering Analysis of Damage in Silicon Caused by Ultra-low Energy Boron Implantation at Different Substrate Temperatures

Shenjun Zhang, Jaap A. Van Den Berg, David G. Armour, Sean Whelan, Richard D. Goldberg, Paul Bailey, Tim C.Q. Noakes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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