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Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness
J.A. Van Den Berg, M. A. Reading, P. Bailey, T. Q. C. Noakes, C. Adelmann, M. Popovici, H. Tielens, T. Conard, S. De Gendt, S. Van Elshocht
Research output: Contribution to journal › Article › peer-review
5
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(Scopus)