Model-based defect detection on structured surfaces having optically unresolved features

Daniel O'Connor, Andrew Henning, Ben Sherlock, Richard K. Leach, Jeremy Michael Coupland, C. L. Giusca

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.
LanguageEnglish
Article number247754
Pages8872-8877
Number of pages6
JournalApplied Optics
Volume54
Issue number30
DOIs
Publication statusPublished - 13 Oct 2015
Externally publishedYes

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defects
Optical systems
field of view
dynamic range
inspection
manufacturing
Inspection
deviation
Defects
Geometry
geometry
Defect detection

Cite this

O'Connor, D., Henning, A., Sherlock, B., Leach, R. K., Coupland, J. M., & Giusca, C. L. (2015). Model-based defect detection on structured surfaces having optically unresolved features. Applied Optics, 54(30), 8872-8877. [247754]. https://doi.org/10.1364/AO.54.008872
O'Connor, Daniel ; Henning, Andrew ; Sherlock, Ben ; Leach, Richard K. ; Coupland, Jeremy Michael ; Giusca, C. L. / Model-based defect detection on structured surfaces having optically unresolved features. In: Applied Optics. 2015 ; Vol. 54, No. 30. pp. 8872-8877.
@article{86beb95ea39346d9861f5d41c124107a,
title = "Model-based defect detection on structured surfaces having optically unresolved features",
abstract = "In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.",
author = "Daniel O'Connor and Andrew Henning and Ben Sherlock and Leach, {Richard K.} and Coupland, {Jeremy Michael} and Giusca, {C. L.}",
year = "2015",
month = "10",
day = "13",
doi = "10.1364/AO.54.008872",
language = "English",
volume = "54",
pages = "8872--8877",
journal = "Applied Optics",
issn = "1559-128X",
publisher = "The Optical Society",
number = "30",

}

O'Connor, D, Henning, A, Sherlock, B, Leach, RK, Coupland, JM & Giusca, CL 2015, 'Model-based defect detection on structured surfaces having optically unresolved features', Applied Optics, vol. 54, no. 30, 247754, pp. 8872-8877. https://doi.org/10.1364/AO.54.008872

Model-based defect detection on structured surfaces having optically unresolved features. / O'Connor, Daniel; Henning, Andrew; Sherlock, Ben; Leach, Richard K.; Coupland, Jeremy Michael; Giusca, C. L.

In: Applied Optics, Vol. 54, No. 30, 247754, 13.10.2015, p. 8872-8877.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Model-based defect detection on structured surfaces having optically unresolved features

AU - O'Connor, Daniel

AU - Henning, Andrew

AU - Sherlock, Ben

AU - Leach, Richard K.

AU - Coupland, Jeremy Michael

AU - Giusca, C. L.

PY - 2015/10/13

Y1 - 2015/10/13

N2 - In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.

AB - In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.

U2 - 10.1364/AO.54.008872

DO - 10.1364/AO.54.008872

M3 - Article

VL - 54

SP - 8872

EP - 8877

JO - Applied Optics

T2 - Applied Optics

JF - Applied Optics

SN - 1559-128X

IS - 30

M1 - 247754

ER -

O'Connor D, Henning A, Sherlock B, Leach RK, Coupland JM, Giusca CL. Model-based defect detection on structured surfaces having optically unresolved features. Applied Optics. 2015 Oct 13;54(30):8872-8877. 247754. https://doi.org/10.1364/AO.54.008872