Model-based defect detection on structured surfaces having optically unresolved features

Daniel O'Connor, Andrew Henning, Ben Sherlock, Richard K. Leach, Jeremy Michael Coupland, C. L. Giusca

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5 Citations (Scopus)

Abstract

In this paper, we demonstrate, both numerically and experimentally, a method for the detection of defects on structured surfaces having optically unresolved features. The method makes use of synthetic reference data generated by an observational model that is able to simulate the response of the selected optical inspection system to the ideal structure, thereby providing an ideal measure of deviation from nominal geometry. The method addresses the high dynamic range challenge faced in highly parallel manufacturing by enabling the use of low resolution, wide field of view optical systems for defect detection on surfaces containing small features over large regions.
Original languageEnglish
Article number247754
Pages (from-to)8872-8877
Number of pages6
JournalApplied Optics
Volume54
Issue number30
DOIs
Publication statusPublished - 13 Oct 2015
Externally publishedYes

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O'Connor, D., Henning, A., Sherlock, B., Leach, R. K., Coupland, J. M., & Giusca, C. L. (2015). Model-based defect detection on structured surfaces having optically unresolved features. Applied Optics, 54(30), 8872-8877. [247754]. https://doi.org/10.1364/AO.54.008872