Multi-technique characterization of arsenic ultra shallow junctions in silicon within the ANNA consortium

D. Giubertoni, G. Pepponi, B. Beckhoff, P. Hoenicke, S. Gennaro, F. Meirer, D. Ingerle, G. Steinhauser, M. Fried, P. Petrik, A. Parisini, M. A. Reading, C. Streli, J. A. Van Den Berg, M. Bersani

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Physics & Astronomy