Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Xiangqian Jiang; Haydn Martin; Kaiwei Wang

doi:10.1364/OL.31.003603

Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Xiangqian Jiang, Haydn Martin, Kaiwei Wang

Research output: Contribution to journal › Article › peer-review

22 Citations (Scopus)

Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

Original language	English
Pages (from-to)	3603-3605
Number of pages	3
Journal	Optics Letters
Volume	31
Issue number	24
DOIs	https://doi.org/10.1364/OL.31.003603
Publication status	Published - 15 Dec 2006

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abstract = "We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.",

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Near Common-Path Optical Fiber Interferometer for Potentially Fast On-Line Microscale-Nanoscale Surface Measurement

Abstract

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