Abstract
We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.
| Original language | English |
|---|---|
| Pages (from-to) | 3603-3605 |
| Number of pages | 3 |
| Journal | Optics Letters |
| Volume | 31 |
| Issue number | 24 |
| DOIs | |
| Publication status | Published - 15 Dec 2006 |