Abstract
The topographic evolution of Si irradiated at room temperature with Ne+ and Ar+ ions in the energy range 5–40 keV at 45° to the substrate normal has been studied. Other than isolated etch pits, no topography results from Ne+ bombardment at all energies and from Ar+ bombardment at 5 and 10 keV. Argon ion bombardment at 20 keV, however, initially produces transverse low‐amplitude waves that transform, with increasing erosion, into larger amplitude, corrugated and faceted, wave‐like structures. The present data do not conform to existing model predictions but do suggest that light low‐energy inert gas ions can be used to inhibit roughening during sputtering erosion.
| Original language | English |
|---|---|
| Pages (from-to) | 514-520 |
| Number of pages | 7 |
| Journal | Surface and Interface Analysis |
| Volume | 23 |
| Issue number | 7-8 |
| DOIs | |
| Publication status | Published - Jul 1995 |
| Externally published | Yes |
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Ne+ and Ar+ ion bombardment‐induced topography on Si. / Carter, G.; Vishnyakov, V.
In: Surface and Interface Analysis, Vol. 23, No. 7-8, 07.1995, p. 514-520.Research output: Contribution to journal › Article
TY - JOUR
T1 - Ne+ and Ar+ ion bombardment‐induced topography on Si
AU - Carter, G.
AU - Vishnyakov, V.
PY - 1995/7
Y1 - 1995/7
N2 - The topographic evolution of Si irradiated at room temperature with Ne+ and Ar+ ions in the energy range 5–40 keV at 45° to the substrate normal has been studied. Other than isolated etch pits, no topography results from Ne+ bombardment at all energies and from Ar+ bombardment at 5 and 10 keV. Argon ion bombardment at 20 keV, however, initially produces transverse low‐amplitude waves that transform, with increasing erosion, into larger amplitude, corrugated and faceted, wave‐like structures. The present data do not conform to existing model predictions but do suggest that light low‐energy inert gas ions can be used to inhibit roughening during sputtering erosion.
AB - The topographic evolution of Si irradiated at room temperature with Ne+ and Ar+ ions in the energy range 5–40 keV at 45° to the substrate normal has been studied. Other than isolated etch pits, no topography results from Ne+ bombardment at all energies and from Ar+ bombardment at 5 and 10 keV. Argon ion bombardment at 20 keV, however, initially produces transverse low‐amplitude waves that transform, with increasing erosion, into larger amplitude, corrugated and faceted, wave‐like structures. The present data do not conform to existing model predictions but do suggest that light low‐energy inert gas ions can be used to inhibit roughening during sputtering erosion.
UR - http://www.scopus.com/inward/record.url?scp=0029336375&partnerID=8YFLogxK
U2 - 10.1002/sia.740230711
DO - 10.1002/sia.740230711
M3 - Article
VL - 23
SP - 514
EP - 520
JO - Surface and Interface Analysis
JF - Surface and Interface Analysis
SN - 0142-2421
IS - 7-8
ER -