Neutral and ion beam SIMS of non-conducting materials

Keyphrases

• Non-conductive Material 100%
• Ion Beam 100%
• Bombardment 100%
• Neutral Beam 100%
• Surface Potential 66%
• Ion Bombardment 66%
• Low Conductivity 66%
• Sample Charging 66%
• Induced Damage 33%
• State of Charge 33%
• Damage Rate 33%
• Calibration Method 33%
• Electron Beam 33%
• Design Basis 33%
• Damage Mechanism 33%
• Precision Control 33%
• Raster 33%
• Inert Gas 33%
• Mass Spectra 33%
• Secondary Ion Mass Spectrometry 33%
• Polymer Materials 33%
• Impact Source 33%
• Sputtering Rate 33%
• Electron Bombardment 33%
• Secondary Ion 33%
• Electron Impact 33%
• Molecular Fragments 33%
• Positive Variety 33%
• Field Configuration 33%
• Source-driven 33%
• Fragment Ions 33%
• Gas Atom 33%
• Peak Height 33%
• Electronic Sputtering 33%
• Height Distribution 33%
• Atom Beam 33%
• Negative Spectrum 33%
• Molecular Cluster Ion 33%

Chemistry

• Ion Beam 100%
• Surface Potential 100%
• Secondary Ion Mass Spectroscopy 100%
• electronics 50%
• Energetics 50%
• Ion Bombardment 50%
• Electron Beam 50%
• Noble Gas Atom 50%
• Secondary Ion Mass Spectrum 50%
• Cluster Ion 50%
• Electron Impact 50%
• Molecular Cluster 50%

Engineering

• Bombardment 100%
• Surface Potential 66%
• Ion Implantation 33%
• Damage Rate 33%
• Induced Damage 33%
• Energetics 33%
• Peak Height 33%
• Calibration Procedure 33%
• Damage Mechanism 33%
• Mass Spectrum 33%
• Mass Spectrometry 33%
• Polymer Material 33%
• Electron Bombardment 33%
• Gas Atom 33%
• Height Distribution 33%
• Charge State 33%