Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

Jiacheng Dai; Wenhan Zeng; Wenbin Zhong; Jane Jiang; Wenlong Lu

doi:10.1016/j.measurement.2023.114091

Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

Jiacheng Dai, Wenhan Zeng, Wenbin Zhong, Jane Jiang, Wenlong Lu

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

The mechanisms of the nonlinear error, primarily stemming from the deviation of the polynomial model fitting the wavelength-distance mapping relationship in chromatic confocal measurement, have been elucidated. A compensation method is proposed for the nonlinear error, based on a regression tree model. Through calibration experiments using our chromatic confocal sensor, an impressive improvement of over 40 % in precision could be achieved by our proposed compensation method, which advances from ±1 μm to ±0.6 μm within a 4 mm measurement range.

Original language	English
Article number	114091
Number of pages	8
Journal	Measurement: Journal of the International Measurement Confederation
Volume	226
Early online date	3 Jan 2024
DOIs	https://doi.org/10.1016/j.measurement.2023.114091
Publication status	Published - 28 Feb 2024

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title = "Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements",

abstract = "The mechanisms of the nonlinear error, primarily stemming from the deviation of the polynomial model fitting the wavelength-distance mapping relationship in chromatic confocal measurement, have been elucidated. A compensation method is proposed for the nonlinear error, based on a regression tree model. Through calibration experiments using our chromatic confocal sensor, an impressive improvement of over 40 % in precision could be achieved by our proposed compensation method, which advances from ±1 μm to ±0.6 μm within a 4 mm measurement range.",

keywords = "Chromatic confocal, Error compensation, Regression tree model",

author = "Jiacheng Dai and Wenhan Zeng and Wenbin Zhong and Jane Jiang and Wenlong Lu",

note = "Funding Information: This work is supported by National Key R&D Plan Strategic Cooperation Key Special Project ( 2023YFE0203200 ), National Natural Science Foundation of China ( 52275533 ), Key R&D Plan of Hubei Province ( 2023BCB085 , 2021BAA056 ), Innovation Project of Optics Valley Laboratory ( OVL2023PY001 ) and Shenzhen Technical Project ( JCY J20210324141814038 ). Publisher Copyright: {\textcopyright} 2023 Elsevier Ltd",

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doi = "10.1016/j.measurement.2023.114091",

language = "English",

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T1 - Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

AU - Dai, Jiacheng

AU - Zeng, Wenhan

AU - Zhong, Wenbin

AU - Jiang, Jane

AU - Lu, Wenlong

N1 - Funding Information: This work is supported by National Key R&D Plan Strategic Cooperation Key Special Project ( 2023YFE0203200 ), National Natural Science Foundation of China ( 52275533 ), Key R&D Plan of Hubei Province ( 2023BCB085 , 2021BAA056 ), Innovation Project of Optics Valley Laboratory ( OVL2023PY001 ) and Shenzhen Technical Project ( JCY J20210324141814038 ). Publisher Copyright: © 2023 Elsevier Ltd

PY - 2024/2/28

Y1 - 2024/2/28

N2 - The mechanisms of the nonlinear error, primarily stemming from the deviation of the polynomial model fitting the wavelength-distance mapping relationship in chromatic confocal measurement, have been elucidated. A compensation method is proposed for the nonlinear error, based on a regression tree model. Through calibration experiments using our chromatic confocal sensor, an impressive improvement of over 40 % in precision could be achieved by our proposed compensation method, which advances from ±1 μm to ±0.6 μm within a 4 mm measurement range.

AB - The mechanisms of the nonlinear error, primarily stemming from the deviation of the polynomial model fitting the wavelength-distance mapping relationship in chromatic confocal measurement, have been elucidated. A compensation method is proposed for the nonlinear error, based on a regression tree model. Through calibration experiments using our chromatic confocal sensor, an impressive improvement of over 40 % in precision could be achieved by our proposed compensation method, which advances from ±1 μm to ±0.6 μm within a 4 mm measurement range.

KW - Chromatic confocal

KW - Error compensation

KW - Regression tree model

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DO - 10.1016/j.measurement.2023.114091

M3 - Article

VL - 226

JO - Measurement

JF - Measurement

SN - 1536-6367

M1 - 114091

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Nonlinear error compensation algorithm for signal resolution of chromatic confocal measurements

Abstract

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