Novel laser datum system for nanometric profilometry for large optical surfaces

Ho Soon Yang, Sug Whan Kim, David Walker

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

We report a new laser datum system for precision point-by-point profilometry of large curved optical surfaces. The laser datum is sensed by a nulling quadrant photodiode mounted in a flexural system with hybrid actuators, which also carries interferometer reference optics for vertical and horizontal displacement measurement. The flexure characteristics such as cross-talk and hysteresis were investigated. The optimum environmental conditions for the active position-control were studied, and closed-loop control was modeled. The experimental results for compensation accuracy showed a repeatability of ±4 nm rms, the compensation accuracy of 10 nm (vertical channel) and 20 nm (horizontal channel).

Original languageEnglish
Pages (from-to)624-631
Number of pages8
JournalOptics Express
Volume11
Issue number6
DOIs
Publication statusPublished - 24 Mar 2003
Externally publishedYes

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