Novel Non-contact Displacement Sensor with Broad Measuring Range

Wenhan Zeng, Jun Guo, Xiangqian Jiang, Tiebang Xie, Zhu Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel non-contact displacement sensor based on the focus detection principle and holographic diffractive grating principle is introduced for engineering surface measurement. This sensor adopts the diffractive grating as the independent measuring etalon. The focus needle is controlled by the servo-control system to track the topography changes and the defocusing is kept within the range of linearity. The diffractive grating follows the voice coil motor to record its displacement. The actual change of the surface topography is the sum of the defocusing and the displacement of the diffractive grating. The measurement range is ±1mm and the resolution is 10nm. This sensor can realize fast, non-contact measurement of surface topography.

Original languageEnglish
Title of host publicationProceedings of the Second International Symposium on Instrumentation Science and Technology
EditorsTan Jiubin, Wen Xianfang
PublisherHarbin Institute of Technology
Pages259-264
Number of pages6
Volume3
ISBN (Print)7560317685
Publication statusPublished - Aug 2002
Externally publishedYes
EventThe 2nd International Symposium on Instrumentation Science and Technology - Jinan, China
Duration: 18 Aug 200222 Aug 2002
Conference number: 2

Conference

ConferenceThe 2nd International Symposium on Instrumentation Science and Technology
Abbreviated titleISIST2002
CountryChina
CityJinan
Period18/08/0222/08/02

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Cite this

Zeng, W., Guo, J., Jiang, X., Xie, T., & Li, Z. (2002). Novel Non-contact Displacement Sensor with Broad Measuring Range. In T. Jiubin, & W. Xianfang (Eds.), Proceedings of the Second International Symposium on Instrumentation Science and Technology (Vol. 3, pp. 259-264). Harbin Institute of Technology.