Novel spatial scanning technique for surface roughness measurement

F. Xie, Wei Zhang, X. Q. Jiang, Liang Zhang, I. Bennion

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We present the first spatial scanning system using wavelength-spatial transformation of chromatic dispersion device. Optical probe used in fiber optic interferometer for surface measurement is demonstrated by using diffraction grating and wavelength scanning technique.

Original languageEnglish
Title of host publication2003 IEEE LEOS Annual Meeting Conference Proceedings
PublisherIEEE
Pages97-98
Number of pages2
Volume2
ISBN (Print) 0780378881
DOIs
Publication statusPublished - 2003
EventThe 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society - Tucson, United States
Duration: 26 Oct 200330 Oct 2003
Conference number: 16

Publication series

NameIEEE Photonics Conference (IPC)
PublisherIEEE
ISSN (Print)1092-8081

Conference

ConferenceThe 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society
Abbreviated titleLEOS 2003
CountryUnited States
CityTucson
Period26/10/0330/10/03

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Xie, F., Zhang, W., Jiang, X. Q., Zhang, L., & Bennion, I. (2003). Novel spatial scanning technique for surface roughness measurement. In 2003 IEEE LEOS Annual Meeting Conference Proceedings (Vol. 2, pp. 97-98). (IEEE Photonics Conference (IPC)). IEEE. https://doi.org/10.1109/LEOS.2003.1251618