Novel spatial scanning technique for surface roughness measurement

F. Xie; Wei Zhang; X. Q. Jiang; Liang Zhang; I. Bennion

doi:10.1109/LEOS.2003.1251618

Novel spatial scanning technique for surface roughness measurement

F. Xie, Wei Zhang, X. Q. Jiang, Liang Zhang, I. Bennion

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

We present the first spatial scanning system using wavelength-spatial transformation of chromatic dispersion device. Optical probe used in fiber optic interferometer for surface measurement is demonstrated by using diffraction grating and wavelength scanning technique.

Original language	English
Title of host publication	2003 IEEE LEOS Annual Meeting Conference Proceedings
Publisher	IEEE
Pages	97-98
Number of pages	2
Volume	2
ISBN (Print)	0780378881
DOIs	https://doi.org/10.1109/LEOS.2003.1251618
Publication status	Published - 2003
Event	The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society - Tucson, United States Duration: 26 Oct 2003 → 30 Oct 2003 Conference number: 16

Publication series

Name	IEEE Photonics Conference (IPC)
Publisher	IEEE
ISSN (Print)	1092-8081

Conference

Conference	The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society
Abbreviated title	LEOS 2003
Country/Territory	United States
City	Tucson
Period	26/10/03 → 30/10/03

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@inproceedings{e78a8ded955546318b3f6fa1dfe8a40a,

title = "Novel spatial scanning technique for surface roughness measurement",

abstract = "We present the first spatial scanning system using wavelength-spatial transformation of chromatic dispersion device. Optical probe used in fiber optic interferometer for surface measurement is demonstrated by using diffraction grating and wavelength scanning technique.",

keywords = "Rough surfaces, Surface roughness, Optical surface waves, Wavelength measurement, Optical interferometry, Chromatic dispersion, Optical devices, Probes, Optical fibers, Surface waves",

author = "F. Xie and Wei Zhang and Jiang, {X. Q.} and Liang Zhang and I. Bennion",

year = "2003",

doi = "10.1109/LEOS.2003.1251618",

language = "English",

isbn = " 0780378881",

volume = "2",

series = "IEEE Photonics Conference (IPC)",

publisher = "IEEE",

pages = "97--98",

booktitle = "2003 IEEE LEOS Annual Meeting Conference Proceedings",

address = "United States",

note = "The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003 ; Conference date: 26-10-2003 Through 30-10-2003",

}

Xie, F, Zhang, W, Jiang, XQ, Zhang, L & Bennion, I 2003, Novel spatial scanning technique for surface roughness measurement. in 2003 IEEE LEOS Annual Meeting Conference Proceedings. vol. 2, IEEE Photonics Conference (IPC), IEEE, pp. 97-98, The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, Tucson, Arizona, United States, 26/10/03. https://doi.org/10.1109/LEOS.2003.1251618

TY - GEN

T1 - Novel spatial scanning technique for surface roughness measurement

AU - Xie, F.

AU - Zhang, Wei

AU - Jiang, X. Q.

AU - Zhang, Liang

AU - Bennion, I.

N1 - Conference code: 16

PY - 2003

Y1 - 2003

N2 - We present the first spatial scanning system using wavelength-spatial transformation of chromatic dispersion device. Optical probe used in fiber optic interferometer for surface measurement is demonstrated by using diffraction grating and wavelength scanning technique.

AB - We present the first spatial scanning system using wavelength-spatial transformation of chromatic dispersion device. Optical probe used in fiber optic interferometer for surface measurement is demonstrated by using diffraction grating and wavelength scanning technique.

KW - Rough surfaces

KW - Surface roughness

KW - Optical surface waves

KW - Wavelength measurement

KW - Optical interferometry

KW - Chromatic dispersion

KW - Optical devices

KW - Probes

KW - Optical fibers

KW - Surface waves

UR - http://www.scopus.com/inward/record.url?scp=0344465386&partnerID=8YFLogxK

U2 - 10.1109/LEOS.2003.1251618

DO - 10.1109/LEOS.2003.1251618

M3 - Conference contribution

AN - SCOPUS:0344465386

SN - 0780378881

VL - 2

T3 - IEEE Photonics Conference (IPC)

SP - 97

EP - 98

BT - 2003 IEEE LEOS Annual Meeting Conference Proceedings

PB - IEEE

T2 - The 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society

Y2 - 26 October 2003 through 30 October 2003

ER -

Novel spatial scanning technique for surface roughness measurement

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