On-line surface inspection using cylindrical lens-based spectral domain low-coherence interferometry

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We present a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques by using cylindrical lenses as the objective lenses in a Michelson interferometric configuration to enable the measurement of long profiles. Combined with a modern high-speed CCD camera, general-purpose graphics processing unit, and multicore processors computing technology, fast measurement can be achieved. By translating the tested sample during the measurement procedure, real-time surface inspection was implemented, which is proved by the large-scale 3D surface measurement in this paper. ZEMAX software is used to simulate the SD-LCI system and analyze the alignment errors. Two step height surfaces were measured, and the captured interferograms were analyzed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.

LanguageEnglish
Pages5510-5516
Number of pages7
JournalApplied Optics
Volume53
Issue number24
DOIs
Publication statusPublished - 20 Aug 2014

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Interferometry
inspection
Lenses
interferometry
Inspection
lenses
profiles
High speed cameras
Surface measurement
CCD cameras
translating
high speed cameras
Fast Fourier transforms
shot
central processing units
specifications
Specifications
alignment
computer programs
configurations

Cite this

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abstract = "We present a spectral domain low-coherence interferometry (SD-LCI) method that is effective for applications in on-line surface inspection because it can obtain a surface profile in a single shot. It has an advantage over existing spectral interferometry techniques by using cylindrical lenses as the objective lenses in a Michelson interferometric configuration to enable the measurement of long profiles. Combined with a modern high-speed CCD camera, general-purpose graphics processing unit, and multicore processors computing technology, fast measurement can be achieved. By translating the tested sample during the measurement procedure, real-time surface inspection was implemented, which is proved by the large-scale 3D surface measurement in this paper. ZEMAX software is used to simulate the SD-LCI system and analyze the alignment errors. Two step height surfaces were measured, and the captured interferograms were analyzed using a fast Fourier transform algorithm. Both 2D profile results and 3D surface maps closely align with the calibrated specifications given by the manufacturer.",
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On-line surface inspection using cylindrical lens-based spectral domain low-coherence interferometry. / Tang, Dawei; Gao, Feng; Jiang, X.

In: Applied Optics, Vol. 53, No. 24, 20.08.2014, p. 5510-5516.

Research output: Contribution to journalArticle

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