TY - JOUR
T1 - On-machine correction of form error for structured surfaces with anisotropic diffusion filter
AU - Wang, Maomao
AU - Zhong, Wenbin
AU - Yu, Guoyu
AU - Scott, Paul
AU - Jiang, Jane
AU - Zeng, Wenhan
N1 - Funding Information:
The authors would like to acknowledge the UK's EPSRC funding of the Future Metrology Hub (EP/P006930/1), the UK's STFC-IPS funding (ST/W005263/1) to support this work.
Publisher Copyright:
© 2024 The Author(s)
PY - 2024/8/15
Y1 - 2024/8/15
N2 - Structured surfaces with high aspect ratio are promising in optical components, healthcare devices, and microelectronics. A preferable method to create precise structured surfaces is using single point diamond turning with on-machine surface measurement (OMSM). However, fabricating these surfaces often pose challenges due to steep gradients and discontinuous slopes, leading to significant form errors in machining. We propose an innovative solution by employing partial differential equation (PDE) filtration in a closed loop compensation process to enhance form accuracy and surface roughness compared to traditional methods. We tackle the problem of over-smoothing induced profile error encountered with traditional Gaussian filters. The proposed compensation strategy adapts to surface curvature and reduces instrument noise during on-machine measurements. Experimental of fabricating a segment spherical artefact, demonstrate improved precision. After adopting the proposed method, the form error is reduced from 1.2 µm to 0.5 µm and vibration ripples are mitigated, and a better surface finish is achieved.
AB - Structured surfaces with high aspect ratio are promising in optical components, healthcare devices, and microelectronics. A preferable method to create precise structured surfaces is using single point diamond turning with on-machine surface measurement (OMSM). However, fabricating these surfaces often pose challenges due to steep gradients and discontinuous slopes, leading to significant form errors in machining. We propose an innovative solution by employing partial differential equation (PDE) filtration in a closed loop compensation process to enhance form accuracy and surface roughness compared to traditional methods. We tackle the problem of over-smoothing induced profile error encountered with traditional Gaussian filters. The proposed compensation strategy adapts to surface curvature and reduces instrument noise during on-machine measurements. Experimental of fabricating a segment spherical artefact, demonstrate improved precision. After adopting the proposed method, the form error is reduced from 1.2 µm to 0.5 µm and vibration ripples are mitigated, and a better surface finish is achieved.
KW - Form error
KW - On machine measurement
KW - PDE filter
KW - Single point diamond turning
KW - Structured surface
UR - http://www.scopus.com/inward/record.url?scp=85195690729&partnerID=8YFLogxK
U2 - 10.1016/j.measurement.2024.115098
DO - 10.1016/j.measurement.2024.115098
M3 - Article
AN - SCOPUS:85195690729
VL - 236
JO - Measurement
JF - Measurement
SN - 1536-6367
M1 - 115098
ER -