On-machine frequency analysis of diamond turned surfaces with surface intrinsic mode decomposition

Evaluating surface frequency components in the fabrication process is critical for controlling the machined surface quality. The presence of anisotropic ripples on diamond-turned surfaces makes this challenging. A multiscale frequency evaluation method, referred to as Surface Intrinsic Mode Decomposition (SIMD), is proposed for evaluating on-machine surface measurement (OMSM) data. It decomposes continuous surface probing profiles, incorporating both temporal and spatial frequency information. In comparison to the conventional power spectral density (PSD) analysis method, the approach enriches frequency details over a wider range, which contributes to a more comprehensive understanding of surface quality and helps to identify mid-spatial frequency (MSF) errors.