On-Machine Measurement System and Its Application in Ultra-Precision Manufacturing

Xiangqian Jiang, Zhen Tong, Duo Li

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review


The increasing complexity of functional surface structures in terms of structure size and area shape and scale brings considerable challenges on the existing ultra-precision manufacturing and surface measurement technologies. The discrete nature of manufacturing cycle in industry where the measurement instrument used for quality assessment is normally in an offline manner significantly limits productivity and flexibility.

This chapter gives a brief coverage to the historical development of surface metrology and measurement systems embedded within the manufacturing process. The current typical metrological techniques and instrumentation for carrying out embedded surface metrology are presented from the aspects of working principle, advantages, applications, and limitations. The specific emphasis has been put on the applications of embedded measurement system in ultra-precision manufacturing environment. It is found that with embedded metrology, it is possible to further improve the processing efficiency and reliability of high-precision manufacturing. The merits and limitations of embedded measurement systems used in ultra-precision manufacturing are compared and discussed.
Original languageEnglish
Title of host publicationPrecision Machines
EditorsShuming Yang, Jiang Zhuangde
PublisherSpringer Singapore
Number of pages36
ISBN (Electronic)9789811051920
Publication statusE-pub ahead of print - 13 Apr 2019

Publication series

NamePrecision Manufacturing
ISSN (Print)2522-5464
ISSN (Electronic)2522-5472


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