Abstract
Surface measurement is fundamental to further enhance machining accuracy and efficiency in ultra-precision manufacturing. On-machine measurement (OMM) avoids time-consuming realignment operations and possible damage during the transportation between machine and measurement.
In this chapter we first introduce the concept of surface metrology and optical methods for on-machine metrology and the machine tool calibrations. Then we focus the on a single point optical method, namely dispersed reference interferometry (DRI) for on-machine metrology as a case study, including the introduction of the DRI system, its design, its on-machine calibration and the application of DRI to a diamond turning machine.
In this chapter we first introduce the concept of surface metrology and optical methods for on-machine metrology and the machine tool calibrations. Then we focus the on a single point optical method, namely dispersed reference interferometry (DRI) for on-machine metrology as a case study, including the introduction of the DRI system, its design, its on-machine calibration and the application of DRI to a diamond turning machine.
| Original language | English |
|---|---|
| Title of host publication | Hybrid Machining |
| Subtitle of host publication | Theory, Methods, and Case Studies |
| Editors | Xichun Luo, Yi Qin |
| Publisher | Elsevier |
| Chapter | 10 |
| Pages | 239-266 |
| Number of pages | 28 |
| ISBN (Electronic) | 978012813113 |
| ISBN (Print) | 9780128130599 |
| Publication status | Published - 19 Jun 2018 |