On-machine metrology for hybrid machining

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review


Surface measurement is fundamental to further enhance machining accuracy and efficiency in ultra-precision manufacturing. On-machine measurement (OMM) avoids time-consuming realignment operations and possible damage during the transportation between machine and measurement.
In this chapter we first introduce the concept of surface metrology and optical methods for on-machine metrology and the machine tool calibrations. Then we focus the on a single point optical method, namely dispersed reference interferometry (DRI) for on-machine metrology as a case study, including the introduction of the DRI system, its design, its on-machine calibration and the application of DRI to a diamond turning machine.
Original languageEnglish
Title of host publicationHybrid Machining
Subtitle of host publicationTheory, Methods, and Case Studies
EditorsXichun Luo, Yi Qin
Number of pages28
ISBN (Electronic)978012813113
ISBN (Print)9780128130599
Publication statusPublished - 19 Jun 2018


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