Abstract
The inherent difficulties in interpreting thermal desorption spectra are discussed. Possible mechanisms which can change the expected form of the evolution spectra are investigated including the possibility of a distribution of activation energies for release of trapped gas and the spatial distribution of the trapped gas. It is shown that the form of the evolution spectra can be quite misleading and unless care is taken the wrong conclusions can be derived.
Original language | English |
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Pages (from-to) | 303-307 |
Number of pages | 5 |
Journal | Vacuum |
Volume | 29 |
Issue number | 8-9 |
DOIs | |
Publication status | Published - 1 Aug 1979 |
Externally published | Yes |