Optical and structural characterization of Ge clusters embedded in ZrO2

E. Agocs, Z. Zolnai, A. K. Rossall, J. A. van den Berg, B. Fodor, D. Lehninger, L. Khomenkova, S. Ponomaryov, O. Gudymenko, V. Yukhymchuk, B. Kalas, J. Heitmann, P. Petrik

Research output: Contribution to journalArticle

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Abstract

The change of optical and structural properties of Ge nanoclusters in ZrO2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO2 and Ge-rich-ZrO2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO2 layers alternated by 5-nm-ZrO2 ones. Germanium nanoclusters in ZrO2 host were formed by rapid-thermal annealing at 600-800°C during 30s in nitrogen atmosphere. Reference optical properties for pure ZrO2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models.

Original languageEnglish
Pages (from-to)283-288
Number of pages6
JournalApplied Surface Science
Volume421
Issue numberPart B
Early online date20 Mar 2017
DOIs
Publication statusPublished - 1 Nov 2017

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Nanoclusters
Optical properties
Germanium
Spectroscopic ellipsometry
Rapid thermal annealing
Magnetron sputtering
Structural properties
Nitrogen
Scattering
Annealing
Ions
nanoclusters
optical properties
annealing
ion scattering
Temperature
laminates
ellipsometry
germanium
radio frequencies

Cite this

Agocs, E. ; Zolnai, Z. ; Rossall, A. K. ; van den Berg, J. A. ; Fodor, B. ; Lehninger, D. ; Khomenkova, L. ; Ponomaryov, S. ; Gudymenko, O. ; Yukhymchuk, V. ; Kalas, B. ; Heitmann, J. ; Petrik, P. / Optical and structural characterization of Ge clusters embedded in ZrO2. In: Applied Surface Science. 2017 ; Vol. 421, No. Part B. pp. 283-288.
@article{9ba5253d8ea04cf483c47b93c770ec03,
title = "Optical and structural characterization of Ge clusters embedded in ZrO2",
abstract = "The change of optical and structural properties of Ge nanoclusters in ZrO2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO2 and Ge-rich-ZrO2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO2 layers alternated by 5-nm-ZrO2 ones. Germanium nanoclusters in ZrO2 host were formed by rapid-thermal annealing at 600-800°C during 30s in nitrogen atmosphere. Reference optical properties for pure ZrO2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models.",
keywords = "Ge nanoclusters, Medium energy ion scattering, RF magnetron sputtering, Spectroscopic ellipsometry, ZrO",
author = "E. Agocs and Z. Zolnai and Rossall, {A. K.} and {van den Berg}, {J. A.} and B. Fodor and D. Lehninger and L. Khomenkova and S. Ponomaryov and O. Gudymenko and V. Yukhymchuk and B. Kalas and J. Heitmann and P. Petrik",
year = "2017",
month = "11",
day = "1",
doi = "10.1016/j.apsusc.2017.03.153",
language = "English",
volume = "421",
pages = "283--288",
journal = "Applied Surface Science",
issn = "0169-4332",
publisher = "Elsevier",
number = "Part B",

}

Agocs, E, Zolnai, Z, Rossall, AK, van den Berg, JA, Fodor, B, Lehninger, D, Khomenkova, L, Ponomaryov, S, Gudymenko, O, Yukhymchuk, V, Kalas, B, Heitmann, J & Petrik, P 2017, 'Optical and structural characterization of Ge clusters embedded in ZrO2', Applied Surface Science, vol. 421, no. Part B, pp. 283-288. https://doi.org/10.1016/j.apsusc.2017.03.153

Optical and structural characterization of Ge clusters embedded in ZrO2. / Agocs, E.; Zolnai, Z.; Rossall, A. K.; van den Berg, J. A.; Fodor, B.; Lehninger, D.; Khomenkova, L.; Ponomaryov, S.; Gudymenko, O.; Yukhymchuk, V.; Kalas, B.; Heitmann, J.; Petrik, P.

In: Applied Surface Science, Vol. 421, No. Part B, 01.11.2017, p. 283-288.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Optical and structural characterization of Ge clusters embedded in ZrO2

AU - Agocs, E.

AU - Zolnai, Z.

AU - Rossall, A. K.

AU - van den Berg, J. A.

AU - Fodor, B.

AU - Lehninger, D.

AU - Khomenkova, L.

AU - Ponomaryov, S.

AU - Gudymenko, O.

AU - Yukhymchuk, V.

AU - Kalas, B.

AU - Heitmann, J.

AU - Petrik, P.

PY - 2017/11/1

Y1 - 2017/11/1

N2 - The change of optical and structural properties of Ge nanoclusters in ZrO2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO2 and Ge-rich-ZrO2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO2 layers alternated by 5-nm-ZrO2 ones. Germanium nanoclusters in ZrO2 host were formed by rapid-thermal annealing at 600-800°C during 30s in nitrogen atmosphere. Reference optical properties for pure ZrO2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models.

AB - The change of optical and structural properties of Ge nanoclusters in ZrO2 matrix have been investigated by spectroscopic ellipsometry versus annealing temperatures. Radio-frequency top-down magnetron sputtering approach was used to produce the samples of different types, i.e. single-layers of pure Ge, pure ZrO2 and Ge-rich-ZrO2 as well as multi-layers stacked of 40 periods of 5-nm-Ge-rich-ZrO2 layers alternated by 5-nm-ZrO2 ones. Germanium nanoclusters in ZrO2 host were formed by rapid-thermal annealing at 600-800°C during 30s in nitrogen atmosphere. Reference optical properties for pure ZrO2 and pure Ge have been extracted using single-layer samples. As-deposited multi-layer structures can be perfectly modeled using the effective medium theory. However, annealed multi-layers demonstrated a significant diffusion of elements that was confirmed by medium energy ion scattering measurements. This fact prevents fitting of such annealed structure either by homogeneous or by periodic multi-layer models.

KW - Ge nanoclusters

KW - Medium energy ion scattering

KW - RF magnetron sputtering

KW - Spectroscopic ellipsometry

KW - ZrO

UR - http://www.sciencedirect.com/science/journal/01694332?sdc=1

U2 - 10.1016/j.apsusc.2017.03.153

DO - 10.1016/j.apsusc.2017.03.153

M3 - Article

VL - 421

SP - 283

EP - 288

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

IS - Part B

ER -