Origin of atomic clusters during ion sputtering

L. E. Rehn, R. C. Birtcher, S. E. Donnelly, P. M. Baldo, L. Funk

Research output: Contribution to journalArticle

53 Citations (Scopus)

Abstract

Previous studies have shown that the size distributions of small clusters ( n≤40; n=number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters ( n≥500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.
LanguageEnglish
Article number207601
Pages1-4
Number of pages5
JournalPhysical Review Letters
Volume87
Issue number20
Early online date24 Oct 2001
DOIs
Publication statusPublished - 12 Nov 2001
Externally publishedYes

Fingerprint

atomic clusters
sputtering
ions
exponents
ion impact
shock waves
electron microscopy
cascades
atoms
energy

Cite this

Rehn, L. E., Birtcher, R. C., Donnelly, S. E., Baldo, P. M., & Funk, L. (2001). Origin of atomic clusters during ion sputtering. Physical Review Letters, 87(20), 1-4. [207601]. https://doi.org/10.1103/PhysRevLett.87.207601
Rehn, L. E. ; Birtcher, R. C. ; Donnelly, S. E. ; Baldo, P. M. ; Funk, L. / Origin of atomic clusters during ion sputtering. In: Physical Review Letters. 2001 ; Vol. 87, No. 20. pp. 1-4.
@article{d7e7ef18be5749629b44b727ae721f98,
title = "Origin of atomic clusters during ion sputtering",
abstract = "Previous studies have shown that the size distributions of small clusters ( n≤40; n=number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters ( n≥500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.",
author = "Rehn, {L. E.} and Birtcher, {R. C.} and Donnelly, {S. E.} and Baldo, {P. M.} and L. Funk",
year = "2001",
month = "11",
day = "12",
doi = "10.1103/PhysRevLett.87.207601",
language = "English",
volume = "87",
pages = "1--4",
journal = "Physical Review Letters",
issn = "0031-9007",
publisher = "American Physical Society",
number = "20",

}

Rehn, LE, Birtcher, RC, Donnelly, SE, Baldo, PM & Funk, L 2001, 'Origin of atomic clusters during ion sputtering', Physical Review Letters, vol. 87, no. 20, 207601, pp. 1-4. https://doi.org/10.1103/PhysRevLett.87.207601

Origin of atomic clusters during ion sputtering. / Rehn, L. E.; Birtcher, R. C.; Donnelly, S. E.; Baldo, P. M.; Funk, L.

In: Physical Review Letters, Vol. 87, No. 20, 207601, 12.11.2001, p. 1-4.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Origin of atomic clusters during ion sputtering

AU - Rehn, L. E.

AU - Birtcher, R. C.

AU - Donnelly, S. E.

AU - Baldo, P. M.

AU - Funk, L.

PY - 2001/11/12

Y1 - 2001/11/12

N2 - Previous studies have shown that the size distributions of small clusters ( n≤40; n=number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters ( n≥500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

AB - Previous studies have shown that the size distributions of small clusters ( n≤40; n=number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between −8 and −4. Here we report electron microscopy studies of the size distributions of larger clusters ( n≥500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of −2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

UR - http://www.scopus.com/inward/record.url?scp=39249083019&partnerID=8YFLogxK

U2 - 10.1103/PhysRevLett.87.207601

DO - 10.1103/PhysRevLett.87.207601

M3 - Article

VL - 87

SP - 1

EP - 4

JO - Physical Review Letters

T2 - Physical Review Letters

JF - Physical Review Letters

SN - 0031-9007

IS - 20

M1 - 207601

ER -