Paradigm Shifts in Surface Metrology. Part II. The Current Shift

X. Jiang, L. Blunt, P. J. Scott, D. J. Whitehouse

Research output: Contribution to journalReview article

161 Citations (Scopus)

Abstract

This is the second part of the paper 'Paradigm shifts in surface metrology'. In part I, the three historical paradigm shifts in surface metrology were brought together, and the subsequent evolution resulting from the shifts discussed. The historical philosophy highlighted the fact that the paradigm shifts must be robust and flexible, meaning that surface metrology must allow for full control of surface manufacture and provide an understanding of the surface functional performance. Part II presents the current paradigm shift as a 'stepping stone', building on the above historical context. Aspects of surface geometry will also have to cater for surfaces derived from disruptive application, i.e. structured and freeform surfaces are identified candidates. The current shift is presented in three aspects: from profile to areal characterization; from stochastic to structured surfaces; and from simple geometries to complex freeform geometries, all spanning the millimetre to sub-nanometre scales. In this paradigm shift, the scale of surface texture is beginning to approach some of the geometrical features in micro/nano electro-mechanical systems devices and is becoming one of the most important functionality indicators. Part II will contextualize the current shifts in the discipline of surface metrology, and cement surface metrology in place in the ultra precision and nanotechnology age.

Original languageEnglish
Pages (from-to)2071-2099
Number of pages29
JournalProceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences
Volume463
Issue number2085
DOIs
Publication statusPublished - 8 Sep 2007

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