Phase retrieval algorithm for line-scan dispersive interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.
LanguageEnglish
Title of host publicationSixth International Conference on Optical and Photonic Engineering, icOPEN 2018
EditorsChao Zuo, Yingjie Yu, Kemao Qian
PublisherSPIE
Number of pages6
Volume10827
ISBN (Electronic)9781510622562
ISBN (Print)9781510622562
DOIs
Publication statusPublished - 24 Jul 2018
Event Sixth International Conference on Optical and Photonic Engineering - Shanghai, China
Duration: 8 May 201811 May 2018
http://www.icopen.net/ (Link to Conference Website)

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume10827

Conference

Conference Sixth International Conference on Optical and Photonic Engineering
Abbreviated titleicOPEN 2018
CountryChina
CityShanghai
Period8/05/1811/05/18
Internet address

Fingerprint

Interferometry
Diffraction gratings
Charge coupled devices
Interferometers
Pixels

Cite this

Tang, D., Kumar, P., Gao, F., & Jiang, X. (2018). Phase retrieval algorithm for line-scan dispersive interferometry. In C. Zuo, Y. Yu, & K. Qian (Eds.), Sixth International Conference on Optical and Photonic Engineering, icOPEN 2018 (Vol. 10827). [PEN100-129] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10827). SPIE. https://doi.org/10.1117/12.2500918
Tang, Dawei ; Kumar, Prashant ; Gao, Feng ; Jiang, Xiangqian. / Phase retrieval algorithm for line-scan dispersive interferometry. Sixth International Conference on Optical and Photonic Engineering, icOPEN 2018. editor / Chao Zuo ; Yingjie Yu ; Kemao Qian. Vol. 10827 SPIE, 2018. (Proceedings of SPIE - The International Society for Optical Engineering).
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abstract = "The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.",
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Tang, D, Kumar, P, Gao, F & Jiang, X 2018, Phase retrieval algorithm for line-scan dispersive interferometry. in C Zuo, Y Yu & K Qian (eds), Sixth International Conference on Optical and Photonic Engineering, icOPEN 2018. vol. 10827, PEN100-129, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10827, SPIE, Sixth International Conference on Optical and Photonic Engineering, Shanghai, China, 8/05/18. https://doi.org/10.1117/12.2500918

Phase retrieval algorithm for line-scan dispersive interferometry. / Tang, Dawei; Kumar, Prashant; Gao, Feng; Jiang, Xiangqian.

Sixth International Conference on Optical and Photonic Engineering, icOPEN 2018. ed. / Chao Zuo; Yingjie Yu; Kemao Qian. Vol. 10827 SPIE, 2018. PEN100-129 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10827).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AU - Tang, Dawei

AU - Kumar, Prashant

AU - Gao, Feng

AU - Jiang, Xiangqian

N1 - © 2018 Society of Photo Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, or modification of the contents of the publication are prohibited.

PY - 2018/7/24

Y1 - 2018/7/24

N2 - The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.

AB - The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.

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Tang D, Kumar P, Gao F, Jiang X. Phase retrieval algorithm for line-scan dispersive interferometry. In Zuo C, Yu Y, Qian K, editors, Sixth International Conference on Optical and Photonic Engineering, icOPEN 2018. Vol. 10827. SPIE. 2018. PEN100-129. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2500918