Phase retrieval algorithm for line-scan dispersive interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.
Original languageEnglish
Title of host publicationSixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
EditorsYingjie Yu, Chao Zuo, Kemao Qian
PublisherSPIE
Number of pages6
Volume10827
ISBN (Electronic)9781510622579
ISBN (Print)9781510622562
DOIs
Publication statusPublished - 24 Jul 2018
EventSixth International Conference on Optical and Photonic Engineering - Hotel Novotel Shanghai Atlantis, Shanghai, China
Duration: 8 May 201811 May 2018
http://www.icopen.net/
http://www.icopen.net/history.html
https://spie.org/Publications/Proceedings/Volume/10827 (Conference Papers)

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume10827
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceSixth International Conference on Optical and Photonic Engineering
Abbreviated titleicOPEN 2018
CountryChina
CityShanghai
Period8/05/1811/05/18
Internet address

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