Phase retrieval algorithm for line-scan dispersive interferometry

Dawei Tang; Prashant Kumar; Feng Gao; Xiangqian Jiang

doi:10.1117/12.2500918

Phase retrieval algorithm for line-scan dispersive interferometry

Dawei Tang, Prashant Kumar, Feng Gao, Xiangqian Jiang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Citations (Scopus)

Abstract

The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.

Original language	English
Title of host publication	Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
Editors	Yingjie Yu, Chao Zuo, Kemao Qian
Publisher	SPIE
Number of pages	6
Volume	10827
ISBN (Electronic)	9781510622579
ISBN (Print)	9781510622562
DOIs	https://doi.org/10.1117/12.2500918
Publication status	Published - 24 Jul 2018
Event	Sixth International Conference on Optical and Photonic Engineering - Hotel Novotel Shanghai Atlantis, Shanghai, China Duration: 8 May 2018 → 11 May 2018 http://www.icopen.net/ http://www.icopen.net/history.html https://spie.org/Publications/Proceedings/Volume/10827 (Conference Papers)

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	10827
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Sixth International Conference on Optical and Photonic Engineering
Abbreviated title	icOPEN 2018
Country/Territory	China
City	Shanghai
Period	8/05/18 → 11/05/18
Internet address	http://www.icopen.net/ http://www.icopen.net/history.html https://spie.org/Publications/Proceedings/Volume/10827 (Conference Papers)

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This output contributes to the following UN Sustainable Development Goals (SDGs)

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ICOPEN conference paper_AcceptedAccepted author manuscript, 931 KBLicence: Unspecified

Cite this

Tang, D., Kumar, P., Gao, F., & Jiang, X. (2018). Phase retrieval algorithm for line-scan dispersive interferometry. In Y. Yu, C. Zuo, & K. Qian (Eds.), Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018) (Vol. 10827). [108270F] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10827). SPIE. https://doi.org/10.1117/12.2500918

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title = "Phase retrieval algorithm for line-scan dispersive interferometry",

abstract = "The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range. ",

keywords = "Dispersive interferometry, surface metrology, spectral interferogram, phase retrieval",

author = "Dawei Tang and Prashant Kumar and Feng Gao and Xiangqian Jiang",

note = "{\textcopyright} 2018 Society of Photo Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, or modification of the contents of the publication are prohibited. ; Sixth International Conference on Optical and Photonic Engineering, icOPEN 2018 ; Conference date: 08-05-2018 Through 11-05-2018",

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Tang, D , Kumar, P , Gao, F & Jiang, X 2018, Phase retrieval algorithm for line-scan dispersive interferometry. in Y Yu, C Zuo & K Qian (eds), Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018). vol. 10827, 108270F, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10827, SPIE, Sixth International Conference on Optical and Photonic Engineering, Shanghai, China, 8/05/18. https://doi.org/10.1117/12.2500918

Phase retrieval algorithm for line-scan dispersive interferometry. / Tang, Dawei ; Kumar, Prashant ; Gao, Feng et al.

Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018). ed. / Yingjie Yu; Chao Zuo; Kemao Qian. Vol. 10827 SPIE, 2018. 108270F (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10827).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Tang, Dawei

AU - Kumar, Prashant

AU - Gao, Feng

AU - Jiang, Xiangqian

N1 - © 2018 Society of Photo Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, or modification of the contents of the publication are prohibited.

PY - 2018/7/24

Y1 - 2018/7/24

N2 - The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.

AB - The line-scan dispersive interferometry (LSDI) benefits from single-shot measurement in nature and has potential to perform in-line surface metrology. In this technique, the interference beam produced by the two arms of the interferometer is spatially dispersed by a diffraction grating along the rows (or columns) of the CCD pixels. In which case, a two-dimensional spectral interferogram is generated. In this paper, fringe order determination is carried out to retrieve the more accurate phase information along the chromaticity axis of the interferogram and then the height map of the tested profile can be calculated with high resolution. Two standard artefacts have been evaluated using the developed LSDI and the experimental results are compared with that of phase slope method as well as the commercial instrument (Talysurf CCI 3000), which shows that better performance in measurement noise is achieved. Additionally, the measurement repeatability is significantly improved and demonstrated within sub-nanometer range.

KW - Dispersive interferometry

KW - surface metrology

KW - spectral interferogram

KW - phase retrieval

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DO - 10.1117/12.2500918

M3 - Conference contribution

SN - 9781510622562

VL - 10827

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)

A2 - Yu, Yingjie

A2 - Zuo, Chao

A2 - Qian, Kemao

PB - SPIE

T2 - Sixth International Conference on Optical and Photonic Engineering

Y2 - 8 May 2018 through 11 May 2018

ER -

Phase retrieval algorithm for line-scan dispersive interferometry

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Dawei Tang