Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis

Wei Wang; Min Xu; Hongyu Li; Guoyu Yu

doi:10.1117/12.977788

Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis

Wei Wang, Min Xu, Hongyu Li, Guoyu Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 λ and 1/75 λ respectively.

Original language	English
Title of host publication	6th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Subtitle of host publication	Advanced Optical Manufacturing Technologies
Editors	Li Yang, Eric Ruch, Shengyi Li
Publisher	SPIE
Number of pages	8
Volume	8416
ISBN (Print)	9780819490988
DOIs	https://doi.org/10.1117/12.977788
Publication status	Published - 16 Oct 2012
Externally published	Yes
Event	6th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Xiamen, China Duration: 26 Apr 2012 → 29 Apr 2012 Conference number: 6 https://spie.org/OMT/conferencedetails/advanced-optical-manufacturing-technologies (Link to Conference Details )

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	8416
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	6th International Symposium on Advanced Optical Manufacturing and Testing Technologies
Country/Territory	China
City	Xiamen
Period	26/04/12 → 29/04/12
Internet address	https://spie.org/OMT/conferencedetails/advanced-optical-manufacturing-technologies (Link to Conference Details )

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Cite this

Wang, W., Xu, M., Li, H., & Yu, G. (2012). Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis. In L. Yang, E. Ruch, & S. Li (Eds.), 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies (Vol. 8416). [84160P] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8416). SPIE. https://doi.org/10.1117/12.977788

Wang, Wei ; Xu, Min ; Li, Hongyu et al. / Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis. 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. editor / Li Yang ; Eric Ruch ; Shengyi Li. Vol. 8416 SPIE, 2012. (Proceedings of SPIE - The International Society for Optical Engineering).

@inproceedings{03397827e28b4704b2057868db3d0193,

title = "Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis",

abstract = "As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 λ and 1/75 λ respectively.",

keywords = "Bonnet tool polishing, Hertz contact theory, Large aperture mirror, Preston equation, Removal function",

author = "Wei Wang and Min Xu and Hongyu Li and Guoyu Yu",

year = "2012",

month = oct,

day = "16",

doi = "10.1117/12.977788",

language = "English",

isbn = "9780819490988",

volume = "8416",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

editor = "Li Yang and Eric Ruch and Shengyi Li",

booktitle = "6th International Symposium on Advanced Optical Manufacturing and Testing Technologies",

address = "United States",

note = "6th International Symposium on Advanced Optical Manufacturing and Testing Technologies ; Conference date: 26-04-2012 Through 29-04-2012",

url = "https://spie.org/OMT/conferencedetails/advanced-optical-manufacturing-technologies",

}

Wang, W, Xu, M, Li, H & Yu, G 2012, Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis. in L Yang, E Ruch & S Li (eds), 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. vol. 8416, 84160P, Proceedings of SPIE - The International Society for Optical Engineering, vol. 8416, SPIE, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies, Xiamen, China, 26/04/12. https://doi.org/10.1117/12.977788

Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis. / Wang, Wei; Xu, Min; Li, Hongyu et al.

6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. ed. / Li Yang; Eric Ruch; Shengyi Li. Vol. 8416 SPIE, 2012. 84160P (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8416).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Wang, Wei

AU - Xu, Min

AU - Li, Hongyu

AU - Yu, Guoyu

N1 - Conference code: 6

PY - 2012/10/16

Y1 - 2012/10/16

N2 - As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 λ and 1/75 λ respectively.

AB - As the development of modern optical technology, especially space optical science, more high precision mirrors with large apertures are needed. But it is difficult to manufacture high precision large aperture optical components. The method of optical polishing using an ultra-precise bonnet is based upon the technology of computer controlled optical surfacing. A bonnet filled with air is applied as a precise polishing tool which is flexible and able to adapt itself well to the shape of the part, which is superior to other polishing methods. A material removing model of bonnet precessed polishing is established according to kinematic principle based on the Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. A satisfactory result was obtained for one of the surfaces of a wedge mirror with a diameter of 570mm. The resulted PV and RMS parameters are 1/8 λ and 1/75 λ respectively.

KW - Bonnet tool polishing

KW - Hertz contact theory

KW - Large aperture mirror

KW - Preston equation

KW - Removal function

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AN - SCOPUS:84875501208

SN - 9780819490988

VL - 8416

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies

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A2 - Li, Shengyi

PB - SPIE

T2 - 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies

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Wang W, Xu M, Li H, Yu G. Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis. In Yang L, Ruch E, Li S, editors, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. Vol. 8416. SPIE. 2012. 84160P. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.977788

Polishing Large-Aperture Mirror Using Ultraprecise Bonnet and PSD Result Analysis

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