Precipitation of Antimony Implanted into Silicon

S. Koffel, P. Pichler, M. A. Reading, J. A. Van Den Berg, H. Kheyrandish, S. Hamm, W. Lerch, A. Pakfar, C. Tavernier

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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Engineering & Materials Science