Precision metrology: from bulk optics towards metasurface optics

Xiangqian Jiang; Andrew Henning

doi:10.1080/00107514.2022.2101745

Precision metrology: from bulk optics towards metasurface optics

Xiangqian Jiang, Andrew Henning

Research output: Contribution to journal › Review article › peer-review

14 Citations (Scopus)

Abstract

With increasing digitalisation of engineering and the development of smart manufacturing, precision metrology is gradually moving away from the laboratory into real-world environments and production platforms. Interferometry and focus detection are the most popular optical techniques for these types of application due to their non-destructive measurement, high resolution, and fast response. In this article, we discuss their basic principles, limitations and challenges, and new opportunities. Motivated by the rapid development of artificial materials, the application of metasurfaces to drive a new era for future miniaturisation of optical systems becomes suddenly viable. The article discusses advances in modern miniaturisation of optical techniques; and introduces an approach for evolving to a future using metasurface optics. Optical principles and feasibility studies are included in the discussion.

Original language	English
Pages (from-to)	199-216
Number of pages	18
Journal	Contemporary Physics
Volume	62
Issue number	4
Early online date	30 Aug 2022
DOIs	https://doi.org/10.1080/00107514.2022.2101745
Publication status	Published - 30 Aug 2022

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Accepted manuscriptAccepted author manuscript, 6.01 MBLicence: CC BY-NC

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title = "Precision metrology: from bulk optics towards metasurface optics",

abstract = "With increasing digitalisation of engineering and the development of smart manufacturing, precision metrology is gradually moving away from the laboratory into real-world environments and production platforms. Interferometry and focus detection are the most popular optical techniques for these types of application due to their non-destructive measurement, high resolution, and fast response. In this article, we discuss their basic principles, limitations and challenges, and new opportunities. Motivated by the rapid development of artificial materials, the application of metasurfaces to drive a new era for future miniaturisation of optical systems becomes suddenly viable. The article discusses advances in modern miniaturisation of optical techniques; and introduces an approach for evolving to a future using metasurface optics. Optical principles and feasibility studies are included in the discussion.",

keywords = "Precision metrology, interferometry, focus detection, metasurfaces",

author = "Xiangqian Jiang and Andrew Henning",

note = "Funding Information: The authors particularly acknowledge useful discussion and suggestions received from Dr Haydn Martin, Professor David Whitehouse, Professor Paul J Scott, Mr Simon Mckenna, Dr Dawei Tang and Dr James Williamson during the preparation of this paper. The authors gratefully acknowledge the UK{\textquoteright}s Engineering and Physical Sciences Research Council (EPSRC) funded programme EP/T02643X/1, and the UK{\textquoteright}s Royal Academy of Engineering and Renishaw PLC who sponsor Xiangqian Jiang{\textquoteright}s REng/Renishaw Research Chair. Publisher Copyright: {\textcopyright} 2022 Informa UK Limited, trading as Taylor & Francis Group.",

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doi = "10.1080/00107514.2022.2101745",

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T2 - from bulk optics towards metasurface optics

AU - Jiang, Xiangqian

AU - Henning, Andrew

N1 - Funding Information: The authors particularly acknowledge useful discussion and suggestions received from Dr Haydn Martin, Professor David Whitehouse, Professor Paul J Scott, Mr Simon Mckenna, Dr Dawei Tang and Dr James Williamson during the preparation of this paper. The authors gratefully acknowledge the UK’s Engineering and Physical Sciences Research Council (EPSRC) funded programme EP/T02643X/1, and the UK’s Royal Academy of Engineering and Renishaw PLC who sponsor Xiangqian Jiang’s REng/Renishaw Research Chair. Publisher Copyright: © 2022 Informa UK Limited, trading as Taylor & Francis Group.

PY - 2022/8/30

Y1 - 2022/8/30

N2 - With increasing digitalisation of engineering and the development of smart manufacturing, precision metrology is gradually moving away from the laboratory into real-world environments and production platforms. Interferometry and focus detection are the most popular optical techniques for these types of application due to their non-destructive measurement, high resolution, and fast response. In this article, we discuss their basic principles, limitations and challenges, and new opportunities. Motivated by the rapid development of artificial materials, the application of metasurfaces to drive a new era for future miniaturisation of optical systems becomes suddenly viable. The article discusses advances in modern miniaturisation of optical techniques; and introduces an approach for evolving to a future using metasurface optics. Optical principles and feasibility studies are included in the discussion.

AB - With increasing digitalisation of engineering and the development of smart manufacturing, precision metrology is gradually moving away from the laboratory into real-world environments and production platforms. Interferometry and focus detection are the most popular optical techniques for these types of application due to their non-destructive measurement, high resolution, and fast response. In this article, we discuss their basic principles, limitations and challenges, and new opportunities. Motivated by the rapid development of artificial materials, the application of metasurfaces to drive a new era for future miniaturisation of optical systems becomes suddenly viable. The article discusses advances in modern miniaturisation of optical techniques; and introduces an approach for evolving to a future using metasurface optics. Optical principles and feasibility studies are included in the discussion.

KW - Precision metrology

KW - interferometry

KW - focus detection

KW - metasurfaces

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DO - 10.1080/00107514.2022.2101745

M3 - Review article

AN - SCOPUS:85137023520

VL - 62

SP - 199

EP - 216

JO - Contemporary Physics

JF - Contemporary Physics

SN - 0010-7514

IS - 4

ER -

Precision metrology: from bulk optics towards metasurface optics

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