Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics

Ho Soon Yang, David Walker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Original languageEnglish
Title of host publicationLarge Lenses and Prisms
EditorsRichard G. Bingham, David D. Walker
PublisherSPIE
Pages161-170
Number of pages10
Volume4411
ISBN (Print)0819441147, 9780819441140
DOIs
Publication statusPublished - 5 Feb 2002
Externally publishedYes
EventLarge Lenses and Prisms - London, United Kingdom
Duration: 27 Mar 200130 Mar 2001
https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4411.toc

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume4411
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceLarge Lenses and Prisms
CountryUnited Kingdom
CityLondon
Period27/03/0130/03/01
Internet address

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  • Cite this

    Yang, H. S., & Walker, D. (2002). Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics. In R. G. Bingham, & D. D. Walker (Eds.), Large Lenses and Prisms (Vol. 4411, pp. 161-170). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 4411). SPIE. https://doi.org/10.1117/12.454885