Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics

Ho Soon Yang, David Walker

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Original languageEnglish
Pages (from-to)161-170
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4411
DOIs
Publication statusPublished - 5 Feb 2002
Externally publishedYes

Fingerprint

Profilometry
reference systems
Optics
prototypes
optics
Prototype
Laser
Detectors
Lasers
Air
Detector
carriages
lasers
Laser beams
Turbulence
Flexure
flexing
air
detectors
Measurement System

Cite this

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KW - Stylus profilometry

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