Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics

Ho Soon Yang; David Walker

doi:10.1117/12.454885

Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics

Ho Soon Yang, David Walker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Citation (Scopus)

Abstract

In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

Original language	English
Title of host publication	Large Lenses and Prisms
Editors	Richard G. Bingham, David D. Walker
Publisher	SPIE
Pages	161-170
Number of pages	10
Volume	4411
ISBN (Print)	0819441147, 9780819441140
DOIs	https://doi.org/10.1117/12.454885
Publication status	Published - 5 Feb 2002
Externally published	Yes
Event	Large Lenses and Prisms - London, United Kingdom Duration: 27 Mar 2001 → 30 Mar 2001 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4411.toc

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Publisher	SPIE
Volume	4411
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Large Lenses and Prisms
Country/Territory	United Kingdom
City	London
Period	27/03/01 → 30/03/01
Internet address	https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4411.toc

Access to Document

10.1117/12.454885Licence: Unspecified

Cite this

@inproceedings{5dc85cf7cbdc48f0b2863dea11ce9f4a,

title = "Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics",

abstract = "In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.",

keywords = "Air turbulence, Large optics, Laser reference, Stylus profilometry",

author = "Yang, {Ho Soon} and David Walker",

year = "2002",

month = feb,

day = "5",

doi = "10.1117/12.454885",

language = "English",

isbn = "0819441147",

volume = "4411",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

publisher = "SPIE",

pages = "161--170",

editor = "Bingham, {Richard G.} and Walker, {David D.}",

booktitle = "Large Lenses and Prisms",

address = "United States",

note = "Large Lenses and Prisms ; Conference date: 27-03-2001 Through 30-03-2001",

url = "https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4411.toc",

}

Yang, HS & Walker, D 2002, Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics. in RG Bingham & DD Walker (eds), Large Lenses and Prisms. vol. 4411, Proceedings of SPIE - The International Society for Optical Engineering, vol. 4411, SPIE, pp. 161-170, Large Lenses and Prisms, London, United Kingdom, 27/03/01. https://doi.org/10.1117/12.454885

Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics. / Yang, Ho Soon; Walker, David.
Large Lenses and Prisms. ed. / Richard G. Bingham; David D. Walker. Vol. 4411 SPIE, 2002. p. 161-170 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 4411).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics

AU - Yang, Ho Soon

AU - Walker, David

PY - 2002/2/5

Y1 - 2002/2/5

N2 - In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

AB - In this progress report, the authors discuss the use of a laser beam, propagating freely in air, as a reference line for profilometry with a large travel length. The reference beam is detected by a position-sensitive detector and any variation is compensated physically by a two-axis flexure system in closed loop operation. Air turbulence is the main obstacle for the stability of the reference system. It is shown that the relative positions of the position-sensitive detector and the height measurement system is critical for correcting the rotational error of the carriage.

KW - Air turbulence

KW - Large optics

KW - Laser reference

KW - Stylus profilometry

UR - http://www.scopus.com/inward/record.url?scp=0036388435&partnerID=8YFLogxK

U2 - 10.1117/12.454885

DO - 10.1117/12.454885

M3 - Conference contribution

AN - SCOPUS:0036388435

SN - 0819441147

SN - 9780819441140

VL - 4411

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 161

EP - 170

BT - Large Lenses and Prisms

A2 - Bingham, Richard G.

A2 - Walker, David D.

PB - SPIE

T2 - Large Lenses and Prisms

Y2 - 27 March 2001 through 30 March 2001

ER -

Progress on Development of Prototype Laser Reference System for Stylus Profilometry of Large Optics

Abstract

Publication series

Conference

Access to Document

Other files and links

Fingerprint

Cite this