Range and damage distributions in ultra-low energy boron implantation into silicon

N. Hatzopoulos, S. Suder, J. A. van den Berg, S. E. Donnelly, C. E.A. Cook, D. G. Armour, D. Panknin, W. Fukarek, M. Lucassen, L. Frey, M. A. Foad, J. G. England, S. Moffatt, P. Bailey, C. T. Noakes, Hideki Ohno

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review