Rapid measurement of large step heights using a microscopic white-light spectral interferometer

Tong Gao; Yuan Lin; Zhuo Chen; Feng Gao; Xiangqian Jiang

doi:10.1088/2051-672X/ab2b20

Rapid measurement of large step heights using a microscopic white-light spectral interferometer

Tong Gao, Yuan Lin, Zhuo Chen, Feng Gao, Xiangqian Jiang

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value

Original language	English
Article number	025024
Number of pages	8
Journal	Surface Topography: Metrology and Properties
Volume	7
Issue number	2
Early online date	19 Jun 2019
DOIs	https://doi.org/10.1088/2051-672X/ab2b20
Publication status	Published - 26 Jun 2019

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Accepted ManuscriptAccepted author manuscript, 427 KBLicence: CC BY-NC-ND

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title = "Rapid measurement of large step heights using a microscopic white-light spectral interferometer",

abstract = "A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value",

keywords = "step height measurement, spectroscopy, interferometry, Fourier transform",

author = "Tong Gao and Yuan Lin and Zhuo Chen and Feng Gao and Xiangqian Jiang",

year = "2019",

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T1 - Rapid measurement of large step heights using a microscopic white-light spectral interferometer

AU - Gao, Tong

AU - Lin, Yuan

AU - Chen, Zhuo

AU - Gao, Feng

AU - Jiang, Xiangqian

PY - 2019/6/26

Y1 - 2019/6/26

N2 - A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value

AB - A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value

KW - step height measurement

KW - spectroscopy

KW - interferometry

KW - Fourier transform

U2 - 10.1088/2051-672X/ab2b20

DO - 10.1088/2051-672X/ab2b20

M3 - Article

VL - 7

JO - Surface Topography: Metrology and Properties

JF - Surface Topography: Metrology and Properties

SN - 2051-672X

IS - 2

M1 - 025024

ER -

Rapid measurement of large step heights using a microscopic white-light spectral interferometer

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