Rapid measurement of large step heights using a microscopic white-light spectral interferometer

Tong Gao, Yuan Lin, Zhuo Chen, Feng Gao, Xiangqian Jiang

Research output: Contribution to journalArticle

Abstract

A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value
Original languageEnglish
Article number025024
Number of pages8
JournalSurface Topography: Metrology and Properties
Volume7
Issue number2
Early online date19 Jun 2019
DOIs
Publication statusPublished - 26 Jun 2019

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Interferometers
interferometers
Time measurement
Fourier transforms
Scanning
shot
elimination
standard deviation
time measurement
deviation
scanning

Cite this

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title = "Rapid measurement of large step heights using a microscopic white-light spectral interferometer",
abstract = "A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value",
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Rapid measurement of large step heights using a microscopic white-light spectral interferometer. / Gao, Tong; Lin, Yuan; Chen, Zhuo; Gao, Feng; Jiang, Xiangqian.

In: Surface Topography: Metrology and Properties, Vol. 7, No. 2, 025024, 26.06.2019.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Rapid measurement of large step heights using a microscopic white-light spectral interferometer

AU - Gao, Tong

AU - Lin, Yuan

AU - Chen, Zhuo

AU - Gao, Feng

AU - Jiang, Xiangqian

PY - 2019/6/26

Y1 - 2019/6/26

N2 - A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value

AB - A method for rapid measurement of large step heights is proposed. Owing to elimination of mechanical scanning processes, this method possesses a greatly reduced measurement time. The theory underlying the proposed method is described in detail. The single-shot spectral interferometric signal is recorded using a Linnik microscopic white-light spectral interferometer and phase information is retrieved using a windowed Fourier transform. The proposed method was used to measure a 10.083(±0.022) μm step height standard. The mean measured height and standard deviation obtained from ten measurements were 10.0827 μm and 2.1 nm, respectively, and the experimental results agreed well with the calibrated value

KW - step height measurement

KW - spectroscopy

KW - interferometry

KW - Fourier transform

U2 - 10.1088/2051-672X/ab2b20

DO - 10.1088/2051-672X/ab2b20

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